Filka tungsten waxa lagu kululeeyaa heerkul aad u sarreeya oo soo saara elektaroonnada kulul si ay u sii daayaan qulqulka elektarooniga ah ee cufnaanta sare leh, isla mar ahaantaana kororka degdega ah ayaa la dejiyaa si uu u dardargeliyo elektaroonnada kulul si ay u noqdaan qulqulka tamarta sare ee elektarooniga ah. Cufnaanta sare, socodka tamarta sare ee elektarooniga waxay noqon kartaa ionization chlorine ka badan, atomyada filimka birta badan ee ionized si loo helo ions chloride badan si loo hagaajiyo heerka xajinta, taas oo kordhinaysa heerka kaydinta: waxay noqon kartaa ionization birta badan si loo hagaajiyo heerka ionization birta, taas oo u sahlaysa falcelinta dhigista filimka dhismaha; ions lakabka filimka birta ah si ay u gaaraan workpiece si loo hagaajiyo cufnaanta hadda ee gabal shaqada, sidaas darteed kordhinta heerka dhigaalka.
In magnetron sputtering daahan adag, Kordhi cufnaanta hadda iyo ururka filimka ee workpiece hore iyo gadaal ee cathodizing kulul. TiSiCN ka hor inta aan lagu darin cathode kulul, cufnaanta hadda ee workpiece waa 0.2mA / mm, ka dib markii la kordhiyo cathode kulul ilaa 4.9mA / mm2, taas oo u dhiganta korodhka 24 jeer ama wax ka badan, iyo ururka filimku waa cufan. Waxaa la arki karaa in tignoolajiyada dahaarka ee magnetron, ku darida cathode kulul ayaa aad wax ku ool u ah hagaajinta heerka kaydinta qulqulka magnetron iyo waxqabadka qaybaha filimka. Tiknoolajiyadani waxay si weyn u wanaajin kartaa nolosha marawaxadaha marawaxadaha, tuubooyinka dhoobada dhoobada ah, iyo qaybaha wax shiida.
–Maqaalkan waxa soo saaraysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua
Waqtiga boostada: Oct-11-2023

