Kupititsa patsogolo kwa cathode yotentha yopangira magnetron sputtering

Ulusi wa tungsten umatenthedwa kwambiri moti umatulutsa ma elekitironi otentha kuti atulutse mtsinje wa ma elekitironi okwera kwambiri, ndipo nthawi yomweyo electrode yofulumira imayikidwa kuti ifulumizitse ma elekitironi otentha kukhala mtsinje wa ma elekitironi okwera mphamvu. Kuyenda kwa ma elekitironi okwera mphamvu zambiri kumatha kukhala chlorine ionization yambiri, maatomu ambiri a filimu yachitsulo amatha kukhala ionized kuti apeze ma ayoni ambiri a chloride kuti awonjezere kuchuluka kwa ma sputtering, motero kumawonjezera kuchuluka kwa ma deposition: kumatha kukhala ionization yambiri yachitsulo kuti iwonjezere kuchuluka kwa ma ionization achitsulo, komwe kumathandiza kuti filimu yophatikizika ichitike; ma ayoni a filimu yachitsulo kuti afike pa workpiece kuti awonjezere kuchuluka kwa ma workpiece, motero kumawonjezera kuchuluka kwa ma deposition.

Mu magnetron sputtering hard coating, Kuwonjezeka kwa current density ndi film structure ya workpiece kutsogolo ndi kumbuyo kwa hot cathodizing. TiSiCN isanawonjezere hot cathode, current density pa workpiece ndi 0.2mA/mm yokha, pambuyo pa kuwonjezeka kwa hot cathode kufika pa 4.9mA/mm2, zomwe zikufanana ndi kuwonjezeka kwa nthawi 24 kapena kuposerapo, ndipo film structure imakhala yolimba kwambiri. Zikuoneka kuti mu magnetron sputtering coating technology, kuwonjezera hot cathode ndikothandiza kwambiri pakukweza magnetron sputtering deposition rate ndi ntchito ya tinthu ta filimu. Ukadaulo uwu ukhoza kusintha kwambiri moyo wa turbine blades, matope pump plunger, ndi grinder parts.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua