A na-ekpo ọkụ eriri tungsten ruo n'okpomọkụ dị elu nke na-ewepụta elektrọn ọkụ iji wepụta iyi elektrọn dị elu, n'otu oge ahụ a na-ahazi elektrọn na-eme ngwa ngwa iji mee ka elektrọn na-ekpo ọkụ dịkwuo elu ka ọ bụrụ iyi elektrọn dị elu. Njupụta elektrọn dị elu, nke nwere ike ịdị elu nwere ike ịbụ ionization chlorine karịa, a na-eme ka atọm ihe nkiri metal dịkwuo elu iji nweta ion chloride karịa iji melite ọnụego sputtering, si otú a na-eme ka ọnụego nkwụnye ahụ dịkwuo elu: nwere ike ịbụ ionization metal karịa iji melite ọnụego ionization metal, na-enyere aka na mmeghachi omume nke nkwụnye nke ihe nkiri mejupụtara; ion oyi akwa ihe nkiri metal iji ruo na workpiece iji melite njupụta dị ugbu a nke ihe ọrụ ahụ, si otú a na-amụba ọnụego nkwụnye ahụ.
N'ime mkpuchi siri ike nke magnetron sputtering, Mmụba na njupụta dị ugbu a na nhazi ihe nkiri nke workpiece n'ihu na azụ nke cathodizing ọkụ. TiSiCN tupu etinye cathode ọkụ, njupụta dị ugbu a na workpiece bụ naanị 0.2mA/mm, mgbe mmụba nke cathode ọkụ ahụ ruru 4.9mA/mm2, nke hà nhata mmụba nke ugboro 24 ma ọ bụ karịa, nhazi ihe nkiri ahụ dịkwa oke njọ. A pụrụ ịhụ na na teknụzụ mkpuchi magnetron sputtering, mgbakwunye nke cathode ọkụ dị irè nke ukwuu n'imeziwanye ọnụego nkwụnye magnetron sputtering na ọrụ nke ihe nkiri ahụ. Teknụzụ a nwere ike imeziwanye ndụ nke agụba turbine, plungers apịtị, na akụkụ igwe nri nke ukwuu.
–E bipụtara akụkọ a site n'aka onyeigwe mkpuchi igwe emeputa ihe mkpuchiGuangdong Zhenhua
Oge ozi: Ọktoba-11-2023