Filament yetungsten inopiswa kusvika pakupisa kwakanyanya inoburitsa maerekitironi anopisa kuti abudise rwizi rwemaerekitironi ane density yakakura, uye panguva imwe chete electrode inomhanyisa inoiswa kuti ikurumidze maerekitironi anopisa kuti apinde murwizi rwemaerekitironi ane simba guru. Kuyerera kwemaerekitironi ane density yakawanda kunogona kuwedzera chlorine ionization, maatomu akawanda esimbi efirimu anogona kuwedzera ionization kuti awane maion echloride akawanda kuti avandudze sputtering rate, nokudaro zvichiwedzera deposition rate: inogona kuwedzera simbi ionization kuti ivandudze simbi ionization rate, inobatsira pakupindura kwedeposition yefirimu rakabatana; maion esimbi efirimu kusvika paworkpiece kuti avandudze current density yeworkpiece, nokudaro zvichiwedzera deposition rate.
Mu magnetron sputtering hard coating, kuwedzera kwe current density uye kurongeka kwefirimu re workpiece kumberi nekumashure kwe hot cathodizing. TiSiCN usati wawedzera hot cathode, current density pa workpiece inongova 0.2mA/mm, mushure mekuwedzera kwe hot cathode kusvika 4.9mA/mm2, iyo yakaenzana nekuwedzera ka24 kana kupfuura, uye kurongeka kwefirimu kwakawedzera. Zvinogona kuonekwa kuti mu magnetron sputtering coating technology, kuwedzerwa kwe hot cathode kunoshanda zvikuru mukuvandudza magnetron sputtering deposition rate uye kushanda kwezvikamu zvefirimu. Iyi tekinoroji inogona kuvandudza zvakanyanya hupenyu hwe turbine blades, mud pump plunger, uye grinder parts.
–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua
Nguva yekutumira: Gumiguru-11-2023