Ana dumama filament na tungsten zuwa babban zafin jiki wanda ke fitar da electrons masu zafi don fitar da kwararar electrons mai yawan yawa, kuma a lokaci guda ana saita electrode mai sauri don hanzarta electrons masu zafi zuwa kwararar electrons mai yawan kuzari. Gudun electrons mai yawan yawa, mai yawan kuzari na iya zama ƙarin ionization na chlorine, ƙarin atoms na Layer ɗin fim na ƙarfe don samun ƙarin ions na chloride don inganta saurin sputtering, ta haka yana ƙara yawan ajiya: zai iya zama ƙarin ionization na ƙarfe don inganta ƙimar ionization na ƙarfe, wanda ke taimakawa ga amsawar ajiyar fim ɗin mahaɗi; ions na Layer ɗin fim na ƙarfe don isa ga aikin don inganta yawan aikin yanzu, ta haka yana ƙara yawan ajiya.
A cikin murfin magnetron mai tauri, Ƙara yawan halin yanzu da tsarin fim ɗin workpiece na gaba da baya na cathodizing mai zafi. TiSiCN kafin ƙara cathode mai zafi, yawan halin yanzu akan workpiece shine 0.2mA/mm kawai, bayan ƙaruwar cathode mai zafi zuwa 4.9mA/mm2, wanda yayi daidai da ƙaruwa sau 24 ko makamancin haka, kuma tsarin fim ɗin ya fi yawa. Za a iya gani cewa a cikin fasahar rufe magnetron sputtering, ƙara cathode mai zafi yana da tasiri sosai wajen inganta ƙimar ajiyar magnetron sputtering da ayyukan barbashin fim ɗin. Wannan fasaha na iya inganta rayuwar ruwan wukake na turbine, bututun famfo na laka, da sassan niƙa.
– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua
Lokacin Saƙo: Oktoba-11-2023