Ubwoko bwa tekinoroji ya CVD

Muri rusange, CVD irashobora kugabanwa muburyo bubiri: imwe iri mubicuruzwa bimwe kumurongo wimyuka ya substrate yoherejwe na kristu imwe ya epitaxial epitaxial, ikaba ari CVD; ikindi ni ugushira firime yoroheje kuri substrate, harimo ibicuruzwa byinshi na firime amorphous. Ukurikije ubwoko butandukanye bwimyuka ikoreshwa, CVD irashobora kugabanywa muburyo bwo gutwara halogene hamwe no gutumura ibyuma biva mu bimera (MOCVD), ibya mbere bigahagarara nkisoko ya gaze, ibya nyuma bikabyara ibyuma-nganda nkisoko ya gaze. Ukurikije igitutu kiri mucyumba cyitwaramo, gishobora kugabanywamo ubwoko butatu bwingenzi: umuvuduko wikirere CVD (APCVD), umuvuduko muke CVD (LPCVD) na ultra-high vacuum CVD (UHV / CVD) .CVD irashobora kandi gukoreshwa nkuburyo bwabafasha bwongerera ingufu ingufu, kandi muri iki gihe ibisanzwe harimo na plasma yongerewe imbaraga na CVD (PECVD) hamwe na PCV ya CVD (PECVD) hamwe na PCVD.

CVD mubyukuri nuburyo bwo gukora firime aho ibintu bya gaze ya gaze ikoreshwa muburyo bwubushyuhe bwo hejuru kugirango bitange ibintu bikomeye bishyirwa kuri substrate. By'umwihariko, ibyuma bihindagurika cyangwa ibyuma bivangwa n’ibinyabuzima bivangwa na gaze itwara nka H, ​​Ar, cyangwa N, hanyuma bikajyanwa kimwe mu bushyuhe bwo hejuru cyane mu cyumba cyabigenewe kugira ngo bibe firime yoroheje kuri substrate binyuze mu buryo bwa shimi. Ntabwo ubwoko bwa CVD bwaba bumeze bute, kubitsa bishobora gukorwa neza bigomba kuba byujuje ibi bikurikira bikurikira: Icya mbere, mubushyuhe bwo guta, reaction zigomba kugira umuvuduko mwinshi uhagije; Icya kabiri, ibicuruzwa byerekana, hiyongereyeho kubitsa kwifuzwa kuri leta ihamye, ahasigaye leta ya gaze; Icya gatatu, kubitsa ubwabyo bigomba kuba umuvuduko ukabije wumuyaga kugirango harebwe niba uburyo bwo kubitsa bushobora kubikwa mubikorwa byose byubushyuhe; Icya kane, ibikoresho bya substrate bijyanwa kimwe mubyumba byerekana reaction kuri substrate, binyuze mumiti ya reaction kugirango ikore firime yoroheje. Icya kane, umuvuduko wumwuka wibikoresho bya substrate ubwayo ugomba no kuba muke bihagije kubushyuhe bwo kubika.

–Iyi ngingo yasohotse byimashini ikora imashiniGuangdong Zhenhua