Tungsten filament yashyutswe nubushyuhe bwo hejuru busohora electron zishyushye kugirango zisohokane umuyoboro mwinshi wa electron, kandi mugihe kimwe na electrode yihuta yashyizweho kugirango yihutishe electron zishyushye mumigezi ya electron ifite ingufu nyinshi. Umuvuduko mwinshi, ingufu za elegitoronike nyinshi zishobora kuba ionisiyoneri ya chlorine, ibyuma byinshi bya firime ya firime atom ioni kugirango ibone ion nyinshi za chloride kugirango zongere umuvuduko mwinshi, bityo byongere igipimo cyo kubitsa: birashobora kuba ionisiyoneri yicyuma kugirango izamure igipimo cya ionisiyoneri, bifasha reaction yo gushira kwa firime; ibyuma bya firime layer ion kugirango igere kumurimo kugirango itezimbere ubucucike bwibice byakazi, bityo byongere igipimo cyo kubitsa.
Muri magnetron isuka cyane, Kwiyongera mubucucike bwa none no gutunganya firime yibikorwa imbere n'inyuma ya cathodizing ishyushye. TiSiCN mbere yo kongeramo cathode ishyushye, ubucucike buriho ku kazi ni 0.2mA / mm gusa, nyuma yo kwiyongera kwa cathode ishyushye kugera kuri 4.9mA / mm2, ibyo bikaba bihwanye no kwiyongera inshuro 24 cyangwa zirenga, kandi ishyirahamwe rya firime rikaba ryinshi. Birashobora kugaragara ko mubuhanga bwa magnetron sputtering coating, kongeramo cathode ishyushye bigira akamaro kanini mugutezimbere igipimo cya magnetron hamwe nigikorwa cyibice bya firime. Iri koranabuhanga rirashobora kuzamura cyane ubuzima bwibyuma bya turbine, ibyuma bivoma ibyondo, nibice bya gride.
–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua
Igihe cyo kohereza: Ukwakira-11-2023