Mitundu ya CVD Technology

Kunena mwachidule, CVD ikhoza kugawidwa m'mitundu iwiri: imodzi ili mu chinthu chimodzi pagawo laling'ono la nthunzi la single-crystal epitaxial layer, lomwe ndi lochepa kwambiri la CVD; china ndi kuyika kwa mafilimu opyapyala pamtunda, kuphatikizapo mafilimu amitundu yambiri ndi amorphous. Malinga ndi mitundu yosiyanasiyana ya mpweya gwero ntchito, CVD akhoza kugawidwa mu njira halogen zoyendera ndi zitsulo-organic mankhwala nthunzi deposition (MOCVD), wakale kwa halide monga gwero mpweya, yotsirizira kwa zitsulo-organic mankhwala monga gwero mpweya. Malinga ndi kupanikizika mu chipinda chochitira, chingathe kugawidwa m'magulu atatu: kuthamanga kwa mumlengalenga CVD (APCVD), low pressure CVD (LPCVD) ndi Ultra-high vacuum CVD (UHV/CVD) .CVD ingagwiritsidwenso ntchito ngati njira yowonjezera mphamvu yowonjezera mphamvu, ndipo masiku ano zofala zimaphatikizapo plasma ndi CVDCVDhanced plasma ndi CVDhanced plasma (PCVD), etc. CVD kwenikweni ndi njira yoyika gasi.

CVD kwenikweni ndi njira yopangira mafilimu momwe gawo la gasi limagwiridwa ndi mankhwala pa kutentha kwakukulu kuti lipange chinthu cholimba chomwe chimayikidwa pa gawo lapansi. Mwachindunji, zitsulo zosasunthika za halides kapena zitsulo zopangidwa ndi zitsulo zimasakanizidwa ndi mpweya wonyamulira monga H, Ar, kapena N, ndiyeno zimatengedwa mofanana kupita kumalo otentha kwambiri m'chipinda chochitiramo kuti apange filimu yopyapyala pa gawo lapansi pogwiritsa ntchito mankhwala. Ziribe kanthu kuti CVD yamtundu wanji, kuyika kumatha kuchitidwa bwino kuyenera kukwaniritsa izi: Choyamba, pakutentha kwamafuta, ma reactants ayenera kukhala ndi mphamvu ya nthunzi yokwanira; Chachiwiri, anachita mankhwala, kuwonjezera pa ankafuna gawo kwa olimba boma, ena onse mpweya boma; Chachitatu, gawo lokhalo liyenera kukhala lotsika kwambiri la nthunzi kuti liwonetsetse kuti njira yoyendetsera ntchitoyo ikhoza kusungidwa munjira yonse ya gawo lapansi lotentha; Chachinayi, zinthu zapansi panthaka zimasamutsidwa kupita kuchipinda chomwe chili pagawo lapansi, kudzera muzochita kupanga filimu yopyapyala. Chachinayi, mphamvu ya nthunzi ya gawo lapansi payokha iyeneranso kukhala yotsika mokwanira pa kutentha kwa malo.

-Nkhaniyi yatulutsidwa bywopanga makina opangira vacuumGuangdong Zhenhua