Kuwongolera kwa cathode kwa magnetron sputtering

Tungsten filament imatenthedwa ndi kutentha kwakukulu komwe kumatulutsa ma electron otentha kuti atulutse mtsinje wa electron wochuluka kwambiri, ndipo nthawi yomweyo electrode yothamanga imayikidwa kuti ifulumizitse ma electrons otentha mumtsinje wamagetsi wamagetsi. Mkulu-kachulukidwe, mkulu-mphamvu elekitironi otaya kungakhale kwambiri klorini ionization, zambiri zitsulo filimu wosanjikiza maatomu ionized kupeza ayoni zambiri kloridi kusintha mlingo sputtering, potero kuonjezera mafunsidwe mlingo: akhoza kukhala zambiri zitsulo ionization kusintha zitsulo mlingo ionization, zabwino zimene mafunsidwe a pawiri filimu; zitsulo filimu wosanjikiza ayoni kufika workpiece kusintha kachulukidwe panopa ntchito chidutswa, potero kuonjezera mafunsidwe mlingo.

Mu magnetron sputtering zokutira zolimba, Kuchulukitsa kachulukidwe panopa ndi filimu gulu la workpiece kutsogolo ndi kumbuyo kwa cathodizing otentha. TiSiCN isanayambe kuwonjezeredwa kwa cathode yotentha, kachulukidwe kameneka pa workpiece ndi 0.2mA / mm yokha, pambuyo pa kuwonjezeka kwa cathode yotentha mpaka 4.9mA / mm2, yomwe ili yofanana ndi kuwonjezeka kwa nthawi 24 kapena kuposerapo, ndipo bungwe la filimuyo ndi lolimba kwambiri. Tingaone kuti mu magnetron sputtering ❖ kuyanika luso, Kuwonjezera cathode otentha kwambiri kuwongolera magnetron sputtering mafunsidwe mlingo ndi ntchito ya filimu particles. Ukadaulo uwu ukhoza kusintha kwambiri moyo wa masamba a turbine, zopumira zamatope zamatope, ndi zida zopukutira.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua