I roto i ngā pūnaha paninga korehau, ko te huihuinga papu korehau te wāhanga matua e kawenga ana mō te whakatū me te pupuri i te korehau tukanga e hiahiatia ana. Ka pā tika tōna āhua mahi ki te tere papu, te pēhanga mutunga, te ma o te pūnaha, me te ōritetanga me te pumau o ngā tukanga paninga. He mea nui te tautuhi i ngā huringa tiaki tika me te whakatinana i ngā tikanga tiaki paerewa kia roa ai te mahi pono o ngā taputapu paninga korehau.
1. Te Tūranga oNgā Papu Korehau i roto i ngā Pūnaha Paninga
I roto i ngā tukanga paninga korehau PVD me CVD, ko ngā pūnaha papu korehau he mea hanga ki ngā papu tautoko, ki ngā papu Pūtake, ki ngā papu horapa, ki ngā papu turbomolecular rānei, e mahi ana i ētahi mahi nui:
Te whakatū me te pupuri i te whānuitanga korehau e hiahiatia ana
Te tango tōtika i ngā hau toenga, te makuku, me ngā hua o te tukanga
Te whakaiti i ngā pēhanga ā-wāhanga o ngā hau papamuri hei whakapai ake i te matotoru me te parakore o te kiriata
Te whakarite i te pumau o te plasma me te auautanga o te tukanga
Mā te hekenga o te mahi a te papu ka heke te tere papu me te pēhanga mutunga, ka pā tika ki te piri o te kiriata, te ōritetanga, me te hua.
2. Ngā Momo Papu Korehau Noa me ngā Wā Tiaki Noa
1. Ngā Papu Waewae Hurihuri
Ngā mahi tiaki matua:
Te tirotiro me te whakakapi i te hinu papu
Te horoi i ngā tātari kohu hinu
Te tirotiro i ngā hiri me ngā vane
Ngā wā kua tūtohutia:
Arotake hinu: ia wiki
Whakakapinga hinu: ia 3–6 marama (i runga i ngā hau tukatuka me ngā hāora mahi)
Ratonga matua: ia tau
2. Ngā Papu Pūtake
Ngā mahi tiaki matua:
Te tirotiro hinu mō ngā pouaka miihini
Te tirotiro i ngā hiri me ngā hononga o te pou
Ngā arowhai horoi ā-roto
Ngā wā kua tūtohutia:
Tirotiro hinu whakahinuhinu: ia 3 marama
Whakakapinga hinu whakahinuhinu: i ia tau
Ngā arowhai whakahaere: ia marama
3. Ngā Papu Horohoro
Ngā mahi tiaki matua:
Te tirotiro i te hinu papu horapa mō te waikura, te poke rānei
Manatoko i te tohanga o te wai whakamatao
Te horoi i ngā mahanga makariri me ngā ārai
Ngā wā kua tūtohutia:
Tirotiro i te āhua o te hinu: ia 3–6 marama
Whakakapinga hinu: ia 12–24 marama
Te horoi i te mahanga makariri: ia 6 marama
4. Ngā Papu Turbomolecular
Ngā mahi tiaki matua:
Te aroturuki i te āhua o te peera
Te aroturuki i te wiri me te pāmahana
Te whakarite kia tika te korehau tautoko
Ngā wā kua tūtohutia:
Te aro turuki tonu i ngā tawhā whakahaere
Ratonga ngaio, whakahoutanga rānei o te wheketere: ia 3–5 tau (e ai ki ngā aratohu a te kaihanga)
3. Ngā Whakaaro Matua mō te Whakahaere
Hei whakaroa i te roa o te mahi a te pūnaha, me te pupuri i te pumau o te mahi, me whai i ngā tikanga whakahaere e whai ake nei:
Whakahaerehia ngā tikanga whakaurunga
Āraia te makuku nui, ngā matūriki, ngā hau waikura rānei kia kaua e tomo ki roto i te papu. Me whakamahi ngā mahanga makariri, ngā tātari, ngā taputapu wehe hau rānei ina hiahiatia.
Me whakarite kia tika te taurite o te papu
Me tutuki te mahi a te papu tautoko i ngā whakaritenga tīmatanga me te whakahaere o ngā papu korehau-nui kia kore ai e rerekē ngā āhuatanga whakahaere.
Aroturuki i ngā tawhā whakahaere
Kia tino aro ki te pāmahana, te iahiko, te wiri, me te haruru. Me tirotiro tonu ngā huringa rerekē.
Whāia ngā tikanga tīmatanga me te whakaweto paerewa
Mā te raupapatanga papu tika ka ārai i te rerenga mai o te hinu, te rere whakamuri, me te ahotea ā-mīhini.
4. Te Pānga o te Tiaki Hē ki ngā Tukanga Paninga
Mā te kore e tika te tiaki i te papu korehau ka arahi pea ki te maha o ngā raruraru e pā ana ki te tukanga, tae atu ki:
Te whakaiti i te pēhanga mutunga me te whakanui ake i te pēhanga hau papamuri
Te nui haere o te whakaurunga poke ki roto i ngā kiriata, te whakaiti i ngā āhuatanga whatu, ā-pūkaha rānei
Te iti o te piri o te kiriata me te pono mō te wā roa
Te teitei ake o ngā reiti rahunga taputapu me te wā kore mahi i whakamaheretia
Mai i ngā tirohanga o te pumau o te tukanga me te utu katoa o te mana whakahaere, he nui ake te whai huatanga o te tiaki ārai i te whakatika whakatika.
5. Whakamutunga
Ehara ngā papu korehau i te wāhanga "whakahaere-ā-wareware" engari he rawa nui e hiahia ana kia whai rautaki tiaki e hāngai ana ki ngā āhuatanga tukatuka, te kawenga mahi, me ngā āhuatanga taiao. Mā te whakatinana i ngā huringa tiaki kua tautuhia pai me ngā tikanga whakahaere paerewa, ka taea e ngā pūnaha paninga korehau te whakatutuki i te pumau mō te wā roa me te tuku i te mahi kiriata angiangi kounga teitei, rite tonu.
–Nātaputapu paninga korehau kaihanga Zhenhua Vacuum
Wā tuku: Hakihea-09-2025