N'ikwu ya n'ụzọ sara mbara, CVD nwere ike kewaa nke ọma ụzọ abụọ: otu dị na otu ngwaahịa na ntinye vapor ntinye nke otu-crystal epitaxial Layer, nke dị obere CVD; nke ọzọ bụ ntinye ihe nkiri dị mkpa na mkpụrụ, gụnyere ihe nkiri multi-product na amorphous. Dị ka ụdị gas dị iche iche eji eme ihe, CVD nwere ike kewaa n'ime usoro njem halogen na metal-organic chemical vapor deposition (MOCVD), nke bụbu halide dị ka isi iyi gas, nke ikpeazụ na ogige metal-organic dị ka isi iyi gas. Dị ka nrụgide dị na ụlọ mmeghachi omume si kwuo, enwere ike kewaa ya n'ime isi atọ: ikuku ikuku CVD (APCVD), obere nrụgide CVD (LPCVD) na ultra-high vacuum CVD (UHV/CVD) .CVD nwekwara ike iji dị ka usoro inyeaka na-emewanye ike, na n'oge a, ndị nkịtị na-agụnye plasma-inhanced (CVD-enhance). (PCVD), wdg. CVD bụ n'ezie usoro ntinye ntinye nke gas.
CVD bụ n'ezie usoro na-emepụta ihe nkiri nke a na-emeghachi ihe na-emepụta gas na-emeghachi omume na okpomọkụ dị elu iji mepụta ihe siri ike nke a na-etinye na mkpụrụ. Kpọmkwem, a na-agwakọta halides metal na-agbanwe agbanwe ma ọ bụ ogige organic metal na gas na-ebu dị ka H, Ar, ma ọ bụ N, wee bufee ya n'otu n'otu gaa na mkpụrụ nwere okpomọkụ dị elu n'ime ụlọ mmeghachi omume iji mepụta ihe nkiri dị mkpa na mkpụrụ site na mmeghachi omume kemịkal. N'agbanyeghị ụdị CVD ọ bụla, nkwụnye ego nwere ike ime nke ọma ga-ezute ọnọdụ ndị a bụ isi: Nke mbụ, na ọnọdụ okpomọkụ nke nkwụnye ego, ndị na-emeghachi ihe ga-enwe nrụgide dị elu nke ukwuu; Nke abụọ, ngwaahịa mmeghachi omume, na mgbakwunye na nkwụnye ego a chọrọ maka steeti siri ike, ihe fọdụrụ na steeti gas; Nke atọ, nkwụnye ego ahụ n'onwe ya kwesịrị ịbụ nrụgide ikuku dị ala nke ọma iji hụ na usoro mmeghachi omume nkwụnye ego nwere ike idowe ya n'ime usoro dum nke mkpụrụ osisi na-ekpo ọkụ; Nke anọ, a na-ebufe ihe ndị ahụ n'otu n'otu gaa na ụlọ mmeghachi omume na mkpụrụ ahụ, site na mmeghachi omume kemịkal na-emepụta ihe nkiri dị mkpa. Nke anọ, nrube isi nke ihe ndị na-emepụta ihe n'onwe ya kwesịkwara ịdị ala nke ọma na ọnọdụ okpomọkụ.
–E wepụtara akụkọ a byonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Mee-04-2024