A na-ekpo ọkụ tungsten filament na okpomọkụ dị elu nke na-eme ka electrons na-ekpo ọkụ na-eme ka ọ pụta ìhè mmiri eletrik dị elu, ma n'otu oge ahụ, a na-edozi electrode na-agba ọsọ iji mee ka electrons na-ekpo ọkụ na-eme ka ọ bụrụ ọkụ eletrik dị elu. High-njupụta, elu-ike electron eruba nwere ike ọzọ chlorine ionization, ọzọ metal film oyi akwa atom ionized iji nweta ihe chloride ion ka mma sputtering ọnụego, si otú na-amụba deposition ọnụego: nwere ike ọzọ metal ionization iji melite metal ionization ọnụego, na-eme ka mmeghachi omume nke deposition nke ogige film; metal film oyi akwa ions iru workpiece ka mma ugbu a njupụta nke ọrụ ibe, si otú na-amụba deposition ọnụego.
Na magnetron sputtering ike mkpuchi, na-abawanye na ugbu a njupụta na film nzukọ nke workpiece n'ihu na azụ nke na-ekpo ọkụ cathodizing. TiSiCN tupu mgbakwunye nke cathode na-ekpo ọkụ, njupụta dị ugbu a na workpiece bụ naanị 0.2mA / mm, mgbe mmụba nke cathode na-ekpo ọkụ na 4.9mA / mm2, nke kwekọrọ na mmụba nke 24 ugboro ma ọ bụ karịa, na nzukọ ihe nkiri ahụ dị oke. Enwere ike ịhụ na na teknụzụ mkpuchi magnetron sputtering, mgbakwunye nke cathode na-ekpo ọkụ na-arụ ọrụ nke ọma n'ịkwalite ọnụego nkwụnye ego magnetron na ọrụ nke ihe nkiri ahụ. Nkà na ụzụ a nwere ike imeziwanye ndụ nke agụba turbine, ihe mgbapụta apịtị, na akụkụ grinder.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Ọktoba 11-2023