Lub tungsten filament yog rhuab mus rau ib tug kub kub uas emits kub electrons emit ib tug high-density electron kwj, thiab nyob rau tib lub sij hawm ib tug accelerating electrode yog teem kom ceev cov electrons kub rau hauv high-zog electron kwj. High-density, high-zog electron flow yuav ua tau ntau chlorine ionization, ntau hlau zaj duab xis txheej atoms ionized kom tau ntau chloride ions los txhim kho tus nqi sputtering, yog li nce tus deposition tus nqi: yuav ua tau ntau hlau ionization los txhim kho cov hlau ionization tus nqi, conducive rau cov tshuaj tiv thaiv ntawm deposition ntawm cov compound zaj duab xis; hlau zaj duab xis txheej ions kom ncav cuag lub workpiece los txhim kho qhov ceev tam sim no ntawm lub workpiece, yog li nce tus nqi deposition.
Nyob rau hauv lub magnetron sputtering nyuaj txheej, nce nyob rau hauv tam sim no ceev thiab zaj duab xis koom haum ntawm lub workpiece pem hauv ntej thiab nraub qaum ntawm kub cathodizing. TiSiCN ua ntej qhov sib ntxiv ntawm cov cathode kub, qhov ceev tam sim no ntawm lub workpiece tsuas yog 0.2mA / mm, tom qab qhov nce ntawm kub cathode mus rau 4.9mA / mm2, uas yog sib npaug rau qhov nce ntawm 24 npaug los yog li ntawd, thiab lub koom haum zaj duab xis yog ntau ntom. Nws tuaj yeem pom tau tias hauv magnetron sputtering txheej tshuab, qhov sib ntxiv ntawm cov kub cathode yog qhov zoo heev hauv kev txhim kho cov magnetron sputtering deposition tus nqi thiab cov kev ua ntawm zaj duab xis hais. Cov thev naus laus zis no tuaj yeem txhim kho lub neej ntawm turbine hniav, av nkos plungers, thiab grinder qhov chaw.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Oct-11-2023