Ma ka ʻōlelo ākea, hiki ke hoʻokaʻawale ʻia ʻo CVD i ʻelua ʻano: ʻo kekahi i loko o ka huahana hoʻokahi ma ka substrate vapor deposition o ka one-crystal epitaxial layer, ʻo ia ka CVD haiki; ʻO ka mea ʻē aʻe ka waiho ʻana o nā kiʻiʻoniʻoni lahilahi ma ka substrate, me nā kiʻiʻoniʻoni multi-product a me amorphous. E like me nā ʻano kinoea kumu like ʻole i hoʻohana ʻia, hiki ke hoʻokaʻawale ʻia ka CVD i ke ʻano kaʻa halogen a me ka hoʻoheheʻe ʻana o ke kinoea metala-organic (MOCVD), ʻo ka mua i ka halide ma ke ʻano he kumu kinoea, ʻo ka mea hope i nā pūhui metala-organic e like me ke kumu kinoea. E like me ke kaomi i loko o ke keʻena pane, hiki ke hoʻokaʻawale ʻia i ʻekolu mau ʻano nui: ka atmospheric pressure CVD (APCVD), haʻahaʻa haʻahaʻa CVD (LPCVD) a me ultra-high vacuum CVD (UHV/CVD). ʻO ka CVD kahi ʻano hoʻoheheʻe kinoea.
He ʻano hana kiʻiʻoniʻoni ʻo CVD kahi e hoʻoneʻe ʻia ai kahi mea kinoea i ka wela kiʻekiʻe e hana i kahi mea paʻa i waiho ʻia ma kahi pani. Hoʻohui ʻia, hui pū ʻia nā halides metala a i ʻole nā mea hoʻohuihui metala me ke kinoea halihali e like me H, Ar, a i ʻole N, a laila lawe like ʻia i kahi substrate wela kiʻekiʻe i loko o ke keʻena pane e hana i kahi kiʻiʻoniʻoni lahilahi ma ka substrate ma o ka hopena kemika. ʻAʻole pili i ke ʻano o ka CVD, hiki ke hoʻokō pono ʻia ka deposition pono e hoʻokō i nā kūlana kumu penei: ʻO ka mua, i ka mahana deposition, pono e loaʻa i nā reactants ke kiʻekiʻe kiʻekiʻe o ka mahu; ʻO ka lua, ʻo ka huahana hopena, me ka waiho ʻana i makemake ʻia no ke kūlana paʻa, ke koena o ke kinoea mokuʻāina; ʻO ke kolu, ʻo ka waiho ʻana iā ia iho e lawa ka haʻahaʻa haʻahaʻa haʻahaʻa e hōʻoia i ke kaʻina hana deposition hiki ke mālama ʻia i ke kaʻina holoʻokoʻa o ka substrate wela; ʻO ka hā, ua lawe like ʻia ka mea substrate i ke keʻena hopena ma ka substrate, ma o ka hopena kemika e hana i kahi kiʻiʻoniʻoni lahilahi. ʻO ka hā, he haʻahaʻa haʻahaʻa ke kaomi mahu o ka mea substrate ponoʻī i ka mahana deposition.
– Hoʻokuʻu ʻia kēia ʻatikala bymea hana mīkini hoʻopaʻa haʻahaʻaGuangdong Zhenhua
Ka manawa hoʻouna: Mei-04-2024