A faɗaɗa magana, CVD za a iya raba kusan nau'i biyu: ɗaya yana cikin samfur guda ɗaya akan jigon tururi na Layer epitaxial guda-crystal, wanda ke ƙunƙuntaccen CVD; ɗayan shine ƙaddamar da fina-finai na bakin ciki a kan substrate, ciki har da samfurori masu yawa da fina-finai amorphous. Dangane da nau'ikan iskar gas iri-iri da aka yi amfani da su, ana iya raba CVD zuwa hanyar safarar halogen da ƙaƙƙarfan tururin sinadarai (MOCVD), tsohon zuwa halide azaman tushen iskar gas, na ƙarshe zuwa mahaɗan ƙarfe-kwayoyin a matsayin tushen iskar gas. According to the pressure in the reaction chamber, it can be divided into three main types: atmospheric pressure CVD (APCVD), low pressure CVD (LPCVD) and ultra-high vacuum CVD (UHV/CVD).CVD can also be used as an energy-enhanced auxiliary method, and nowadays the common ones include plasma-enhanced CVD (PECVD) and light-enhanced CVD (PCVD), da sauransu. CVD shine ainihin hanyar shigar da gas-lokaci.
CVD shine ainihin hanyar samar da fina-finai inda aka mayar da sinadarin gas-lokacin sinadarai a yanayin zafi mai yawa don samar da wani abu mai ƙarfi wanda aka ajiye akan wani abu. Musamman ma, ana haxawa da ma'aunin ƙarfe masu canzawa ko mahaɗan ƙarfe na ƙarfe tare da iskar gas kamar H, Ar, ko N, sannan a ɗauko su daidai gwargwado zuwa ma'aunin zafi mai zafi a cikin ɗakin amsawa don samar da fim na bakin ciki a kan ma'aunin ta hanyar sinadarai. Ko da wane nau'in CVD ne, za'a iya aiwatar da jigo cikin nasara dole ne ya dace da waɗannan sharuɗɗa masu zuwa: Na farko, a cikin zafin jiki na ajiya, masu amsawa dole ne su sami isassun ƙarfin tururi; Na biyu, samfurin amsawa, ban da ajiyar da ake so don m jihar, sauran gaseous jihar; Na uku, ajiya da kanta ya kamata ya zama isasshe ƙananan tururi matsa lamba don tabbatar da cewa za a iya kiyaye tsarin amsawa a cikin dukkan tsarin dumama mai zafi; Na hudu, ana jigilar kayan da aka yi amfani da su daidai da juna zuwa ɗakin amsawa a kan ma'auni, ta hanyar sinadarai don samar da fim na bakin ciki. Na hudu, matsin tururi na kayan da ake amfani da shi da kansa ya kamata kuma ya zama ƙasa da ƙasa sosai a yanayin da ake ajiyewa.
–An fitar da wannan labarin byinjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Mayu-04-2024