Ukugqoka i-vacuum kuhlanganisa kakhulu ukufakwa komusi we-vacuum, ukugqoka okukhafulayo kanye nokugqoka ama-ion, konke okusetshenziselwa ukufaka amafilimu ahlukahlukene ensimbi kanye namafilimu angewona awensimbi ebusweni bezingxenye zepulasitiki ngokucwilisa noma ukukhafula ngaphansi kwezimo ze-vacuum, okungenza ukugqoka okuncanyana kakhulu kube nenzuzo evelele yokunamathela okusheshayo, kodwa intengo nayo iphakeme, futhi izinhlobo zezinsimbi ezingasetshenziswa zincane, futhi ngokuvamile zisetshenziselwa ukugqoka okusebenzayo kwemikhiqizo yezinga eliphezulu.
Ukufakwa komusi we-vacuum kuyindlela yokushisa insimbi ngaphansi kwe-vacuum ephezulu, okwenza incibilike, iphele, futhi yakhe ifilimu yensimbi encane ebusweni besampula ngemva kokupholisa, enobukhulu obungu-0.8-1.2 um. Igcwalisa izingxenye ezincane ezigobile neziyindilinga ebusweni bomkhiqizo owenziwe ukuze kutholakale ubuso obufana nesibuko. Lapho ukufakwa komusi we-vacuum kwenziwa ukuze kutholakale umphumela wesibuko obonakalayo noma ukuze kufakwe umusi wensimbi ngokunamathela okuphansi, ubuso obungezansi kumele bumbozwe.
Ukuphalaza kuvame ukubhekisela ekuphalazeni kwe-magnetron, okuyindlela yokuphalaza ephansi ngesivinini esikhulu. Le nqubo idinga i-vacuum engaba ngu-1 × 10-3Torr, okungukuthi isimo se-vacuum esingu-1.3 × 10-3Pa esigcwele igesi engangenisi i-argon (Ar), futhi phakathi kwe-substrate yepulasitiki (i-anode) kanye nethagethi yensimbi (i-cathode) kanye ne-high-voltage direct current, ngenxa yokukhishwa kwegesi engangenisi i-electron okukhiqizwa ukukhishwa kokukhanya, okukhiqiza i-plasma, i-plasma izoqhumisa ama-athomu ethagethi yensimbi bese iwabeka ku-substrate yepulasitiki. Iningi lezembozo zensimbi ezijwayelekile zisebenzisa ukuphalaza kwe-DC, kuyilapho izinto ze-ceramic ezingezona ezihambisa umoya zisebenzisa ukuphalaza kwe-RF AC.
Ukufakwa kwe-ion kuyindlela lapho kusetshenziswa khona ukukhishwa kwegesi ukuze kufakwe i-ion kancane kugesi noma into ephumayo ngaphansi kwezimo ze-vacuum, futhi into ephumayo noma ama-reactant ayo afakwa ku-substrate ngokubhomba ama-ion egesi noma ama-ion ento ephumayo. Lokhu kufaka phakathi ukuhlanganiswa kwe-ion ye-magnetron sputtering, ukuhlanganiswa kwe-ion ephendulayo, ukuhlanganiswa kwe-ion ye-cathode discharge engenalutho (indlela yokufaka i-cathode vapor engenalutho), kanye nokuhlanganiswa kwe-ion eningi (ukuhlanganiswa kwe-cathode arc ion).
Ukumbozwa okuqhubekayo kwe-magnetron okuqondile okunezinhlangothi ezimbili kumugqa
Ukusebenza kabanzi, kungasetshenziswa emikhiqizweni ye-elekthronikhi efana nesendlalelo sokuvikela se-EMI se-notebook shell, imikhiqizo eyisicaba, ngisho nayo yonke imikhiqizo yendebe yesibani ngaphakathi kwencazelo ethile yokuphakama ingakhiqizwa. Umthamo omkhulu wokulayisha, ukubopha okuhlangene kanye nokubopha okuhlanganisiwe kwezinkomishi zokukhanya ezi-conical zokugqoka okunezinhlangothi ezimbili, okungaba nomthamo omkhulu wokulayisha. Ikhwalithi ezinzile, ukuhambisana okuhle kwesendlalelo sefilimu kusuka ku-batch kuya ku-batch. Izinga eliphezulu lokuzenzakalela kanye nezindleko zokusebenza eziphansi.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Jan-23-2025