Okwu Mmalite nke nkwụnye vapour, sputtering na mkpuchi ion

Mkpuchi ikuku na-agụnyekarị ihe e ji etinye uzuoku, mkpuchi sputtering na mkpuchi ion, nke a na-eji etinye ihe nkiri ígwè na nke na-abụghị ígwè dị iche iche n'elu akụkụ plastik site na distillation ma ọ bụ sputtering n'okpuru ọnọdụ ikuku, nke nwere ike nweta mkpuchi elu dị gịrịgịrị nke nwere uru pụrụ iche nke ịrapara ngwa ngwa, mana ọnụahịa ya dịkwa elu, ụdị ọla ndị enwere ike ịrụ ọrụ dịkwa obere, a na-ejikwa ha eme ihe maka mkpuchi arụmọrụ nke ngwaahịa dị elu.
Ndobe uzuoku vacuum bụ ụzọ isi kpoo ígwè ahụ ọkụ n'okpuru nnukwu oghere, na-eme ka ọ gbazee, gbazee, ma mepụta ihe nkiri ígwè dị gịrịgịrị n'elu ihe nlele ahụ mgbe ọ jụrụ oyi, nke nwere ọkpụrụkpụ nke 0.8-1.2 um. Ọ na-ejupụta obere akụkụ concave na convex n'elu ngwaahịa ahụ e mepụtara iji nweta elu dị ka enyo. Mgbe a na-eme ntinye uzuoku vacuum iji nweta mmetụta enyo na-egosipụta ma ọ bụ iji mee ka ígwè vacuum ghara ịmịkọrọ nke ọma, a ga-ekpuchi elu ala ahụ.

Sputtering na-ezo aka na magnetron sputtering, nke bụ usoro sputtering dị obere ọsọ. Usoro a chọrọ oghere nke ihe dị ka 1 × 10-3Torr, nke bụ 1.3 × 10-3Pa vacuum state juputara na inert gas argon (Ar), na n'etiti plastik substrate (anode) na metal target (cathode) tinyere nnukwu voltaji direct current, n'ihi mkpali electron nke inert gas nke glow discharge na-emepụta, na-emepụta plasma, plasma ga-agbawa atọm nke metal target ma tinye ha na plastik substrate. Ọtụtụ n'ime mkpuchi ígwè izugbe na-eji DC sputtering, ebe ihe seramiiki na-abụghị conductive na-eji RF AC sputtering.

Mkpuchi ion bụ ụzọ e si eji mwepụ gas eme ka gas ma ọ bụ ihe ahụ a gbapụrụ agbapụ bụrụ ion n'okpuru ọnọdụ ikuku, a na-etinyekwa ihe ahụ a gbapụrụ agbapụ ma ọ bụ ihe ndị na-emeghachi omume ya n'elu ihe ahụ site na bọmbụ nke ion gas ma ọ bụ ion nke ihe ahụ a gbapụrụ agbapụ. Ndị a gụnyere mkpuchi ion magnetron sputtering, mkpuchi ion reactive, mkpuchi ion cathode discharge hollow (usoro deposition vapor cathode hollow), na mkpuchi ion multi-arc (mkpuchi ion cathode arc).

Igwe magnetron kwụ ọtọ nwere akụkụ abụọ na-agbagharị agbagharị na-aga n'ihu n'ahịrị
Enwere ike iji ya mee ihe n'ụzọ sara mbara maka ngwaahịa eletrọnịkị dịka ihe mkpuchi EMI nke akwụkwọ ndetu, ngwaahịa dị larịị, na ọbụna ngwaahịa iko oriọna niile dị n'ime nkọwapụta ogologo ụfọdụ. Enwere ike iji ya mee ihe n'ụzọ sara mbara, obere ihe mgbochi na mkpọchi iko ọkụ conical maka mkpuchi akụkụ abụọ, nke nwere ike ịnwe nnukwu ikike ibu. Ọdịdị kwụsiri ike, ezigbo nguzozi nke oyi akwa fim site na ogbe ruo na ogbe. Oke akpaghị aka na obere ọnụ ahịa ọrụ na-agba ọsọ.

–E bipụtara akụkọ a site n'aka onyeigwe mkpuchi igwe emeputa ihe mkpuchiGuangdong Zhenhua