Ko te paninga korehau te nuinga o te wā ko te whakatakoto i te kohu korehau, te paninga pupuhi me te paninga katote, e whakamahia ana ēnei katoa hei whakatakoto i ngā kiriata whakarewa me ngā kiriata kore-whakarewa ki runga i te mata o ngā wāhanga kirihou mā te whakahoro, te pupuhi rānei i raro i ngā āhuatanga korehau, ka taea ai te whiwhi i tētahi paninga mata tino angiangi me te painga nui o te piri tere, engari he nui ake te utu, ā, he iti ake ngā momo whakarewa ka taea te whakahaere, ā, ko te tikanga he paninga mahi mō ngā hua kounga teitei.
Ko te whakatakotoranga kohu korehau he tikanga whakamahana i te konganuku i raro i te korehau teitei, kia rewa ai, kia mimiti ai, kia hanga ai he kiriata konganuku angiangi ki runga i te mata o te tauira i muri i te whakamatao, me te matotoru o te 0.8-1.2 um. Ka whakakīia ngā wāhanga iti piko me ngā wāhanga piko i runga i te mata o te hua kua hangaia kia puta ai he mata rite ki te whakaata. Ina mahia te whakatakotoranga kohu korehau hei whiwhi i te pānga whakaata whakaata, hei mimiti rānei i te maitai he iti te piri, me pania te mata o raro.
Ko te tikanga o te sputtering ko te magnetron sputtering, he tikanga sputtering pāmahana-iti tere-teitei. Ko te tukanga e hiahiatia ana he korehau o te 1 × 10-3Torr, arā, 1.3 × 10-3Pa āhua korehau kua whakakiia ki te hau korehau argon (Ar), ā, i waenganui i te papa kirihou (anode) me te ūnga whakarewa (cathode) me te au tika ngaohiko-tiketike, nā te whakaoho irahiko o te hau korehau i hangaia e te tukunga kanapa, ka puta he plasma, ka pupuhi te plasma i ngā ngota o te ūnga whakarewa ka whakatakoto ki runga i te papa kirihou. Ko te nuinga o ngā paninga whakarewa whānui e whakamahi ana i te sputtering DC, ko ngā rauemi uku kore-arataki e whakamahi ana i te sputtering RF AC.
Ko te paninga katote he tikanga e whakamahia ana he tukunga hau hei whakakoi i te hau, i te matū mimiti rānei i raro i ngā āhuatanga korehau, ā, ka whakatakotoria te matū mimiti, ōna tauhohenga rānei ki runga i te papa mā te pupuhi i ngā katote hau, i ngā katote rānei o te matū mimiti. Kei roto i ēnei ko te paninga katote pupuhi magnetron, te paninga katote tauhohe, te paninga katote tukunga katote tuwhera (tikanga whakatakoto kohu katote tuwhera), me te paninga katote maha-āwhata (paninga katote pewa katote).
Paninga tonu e pupuhi ana te magnetron taha-rua poutū i te rārangi
He whānui te whakamahinga, ka taea te whakamahi mō ngā hua hiko pēnei i te anga pona, te paparanga tiaki EMI, ngā hua papatahi, tae atu ki ngā hua kapu rama katoa i roto i tētahi whakatakotoranga teitei. He nui te kaha uta, he kume kiato, he kume whakarara hoki o ngā kapu rama kōniko hei paninga taha-rua, ka nui ake te kaha uta. He kounga pumau, he rite tonu te paparanga kiriata mai i te puranga ki te puranga. He teitei te taumata o te aunoatanga, ā, he iti te utu mahi whakahaere.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: Hanuere-23-2025