Ukufakwa kwe-magnetron sputtering kwenziwa ekukhishweni kokukhanya, ngobuningi obuphansi bokukhishwa kwamanje kanye nobuningi obuphansi be-plasma ekamelweni lokumboza. Lokhu kwenza ubuchwepheshe be-magnetron sputtering bube nezinkinga ezifana namandla aphansi okubopha i-substrate yefilimu, izinga eliphansi le-ionization yensimbi, kanye nezinga eliphansi lokufakwa. Emshinini wokumboza we-magnetron sputtering, kufakwe idivayisi yokukhipha i-arc, engasebenzisa ukugeleza kwe-electron okuphezulu ku-plasma ye-arc ekhiqizwa ukukhishwa kwe-arc ukuhlanza i-workpiece, futhi ingahlanganyela ekumbozeni nasekufakweni okusizayo.
Engeza umthombo wamandla okukhipha i-arc emshinini wokumboza i-magnetron sputtering, ongaba umthombo omncane we-arc, umthombo we-arc ojikelezayo, noma umthombo we-arc we-cylindrical cathode. Ukugeleza kwe-electron okunamandla kakhulu okukhiqizwa umthombo we-arc we-cathode kungadlala izindima ezilandelayo kuyo yonke inqubo yokumboza i-magnetron sputtering:
1. Hlanza i-workpiece. Ngaphambi kokumboza, vula umthombo we-cathode arc, njll., faka i-ion kugesi nge-arc electron flow, bese uhlanza i-workpiece ngamandla aphansi kanye nama-argon ions anamandla aphezulu.
2. Umthombo we-arc kanye nethagethi yokulawula i-magnetic zihlanganiswa ndawonye. Lapho ithagethi yokubhoboza i-magnetron enokukhishwa kokukhanya ivuselelwa ukuze imbozwe, umthombo we-cathode arc nawo uyavuselelwa, futhi zombili imithombo yokubhoboza imbozwe ngasikhathi sinye. Lapho ukwakheka kwezinto eziqondiwe zokubhoboza i-magnetron kanye nezinto eziqondiwe zomthombo we-arc kuhlukile, izendlalelo eziningi zefilimu zingafakwa, futhi ungqimba lwefilimu olubekwe ngumthombo we-cathode arc luyingqimba ehlanganisiwe kwifilimu enezingqimba eziningi.
3. Umthombo we-cathode arc unikeza ukugeleza kwama-electron aphezulu lapho uhlanganyela ekumbozeni, okwandisa amathuba okushayisana nama-athomu engqimba yefilimu yensimbi ekhafulayo kanye namagesi okusabela, ukuthuthukisa izinga lokufakwa, izinga lokufakwa kwe-ionization yensimbi, kanye nokudlala indima ekusizeni ukufakwa.
Umthombo we-cathode arc ohlelwe emshinini wokumboza we-magnetron sputtering uhlanganisa umthombo wokuhlanza, umthombo wokumboza, kanye nomthombo we-ionization, odlala indima enhle ekuthuthukiseni ikhwalithi yokumboza kwe-magnetron sputtering ngokusebenzisa ukugeleza kwe-arc electron ku-plasma ye-arc.
Isikhathi sokuthunyelwe: Juni-21-2023