Kongera ingufu za Magnetron Sputtering Coating ukoresheje Arc Discharge Power Supply

Gusiga icyuma gishyushya icyuma gikozwe mu icupa ry'urumuri, hamwe n'ubucucike buke bw'amashanyarazi n'ubucucike buke bwa plasma mu cyumba gishyushya. Ibi bituma ikoranabuhanga ryo gusiga icyuma gishyushya icyuma rigira ingaruka mbi nko kuba imbaraga nke zo guhuza icyuma, igipimo gito cya ionization y'icyuma, n'igipimo gito cyo gushyiramo icyuma. Mu mashini ishyushya icyuma gishyushya icyuma gikozwe mu icupa ry'icyuma gishyushya icyuma, hongerwamo icyuma gishyushya icyuma gishyushya icyuma, gishobora gukoresha electron nyinshi zigenda muri plasma ya arc ikorwa n'icyuma gishyushya icyuma kugira ngo gisukure igikoresho gikorerwamo, gishobora kandi kugira uruhare mu gusiga no gushyiramo icyuma mu buryo bw'inyongera.

Shyiramo isoko y'amashanyarazi yo gukuraho arc mu mashini ikoresha magnetron sputtering, ishobora kuba isoko ntoya y'arc, isoko y'arc ifite uruziga rw'impande, cyangwa isoko y'arc ifite uruziga rwa cylindrical cathode. Urujya n'uruza rwa electron rufite ubucucike bwinshi rukomoka ku isoko y'arc ya cathode rushobora kugira uruhare rukurikira mu gikorwa cyose cyo gusiga arc ya magnetron sputtering:
1. Sukura igikoresho cyo gukora. Mbere yo gusiga, fungura isoko ya cathode arc, nibindi, shyiramo iyoni kuri gaze ukoresheje electron ya arc, hanyuma usukure igikoresho ukoresheje ingufu nke na iyoni za argon zifite ubucucike bwinshi.
2. Isoko ry'umusenyi n'icyerekezo cyo kugenzura magnetron bishyirwa hamwe. Iyo intego yo gusohora magnetron irimo urumuri ikoreshejwe kugira ngo irangirwe, isoko ry'umusenyi naryo rirakora, kandi amasoko yombi yo gutwikira icyarimwe. Iyo imiterere y'ibikoresho byo gusohora magnetron n'ibikoresho byo gusohora magnetron bitandukanye, urwego rwinshi rwa filime rushobora gushyirwaho, kandi urwego rwa filime rushyirwamo n'isoko ry'umusenyi rwa cathode rushyirwa hamwe muri filime ifite urwego rwinshi.
3. Isoko ya cathode arc itanga electron nyinshi iyo ikora irangi, yongera amahirwe yo kugongana na atome z'icyuma zirimo amatasi n'imyuka ikoreshwa mu gukora irangi, yongera umuvuduko wo gushyiramo, umuvuduko wa ionization y'icyuma, kandi ikagira uruhare mu gufasha gushyiramo.

Isoko ya cathode arc ikoreshwa mu mashini ikora sputtering ya magnetron ihuza isoko yo gusukura, isoko yo gusiga, n'isoko ya ionization, igira uruhare rwiza mu kunoza ireme rya sputtering ya magnetron ikoresheje urujya n'uruza rwa electron ya arc muri plasma ya arc.