Inganta Rufin Magnetron Sputtering tare da Ƙarfin Wutar Lantarki na Arc

Ana yin murfin Magnetron sputtering a cikin fitar haske, tare da ƙarancin yawan fitar da ruwa da ƙarancin yawan plasma a cikin ɗakin rufewa. Wannan yana sa fasahar sputtering magnetron tana da rashin amfani kamar ƙarancin ƙarfin haɗin fim, ƙarancin ƙimar ionization na ƙarfe, da ƙarancin ƙimar ajiya. A cikin injin rufe magnetron sputtering, ana ƙara na'urar fitar da ruwa, wanda zai iya amfani da kwararar electron mai yawa a cikin plasma na baka da aka samar ta hanyar fitar da ruwa don tsaftace aikin. Hakanan yana iya shiga cikin rufewa da ajiyar taimako.

Ƙara tushen wutar lantarki mai fitar da iska a cikin injin murfin magnetron, wanda zai iya zama ƙaramin tushen baka, tushen baka mai kusurwa huɗu, ko tushen baka mai siffar silinda. Gudun lantarki mai yawan yawa wanda tushen baka na cathode ke samarwa zai iya taka rawa kamar haka a cikin dukkan aikin murfin magnetron sputtering:
1. Tsaftace kayan aikin. Kafin a shafa, a kunna tushen baka na cathode, da sauransu, a yi amfani da iskar gas mai ionize da kwararar electron arc, sannan a tsaftace kayan aikin da ƙarancin kuzari da ions argon masu yawa.
2. An rufe tushen baka da kuma maƙasudin sarrafa maganadisu tare. Lokacin da aka kunna maƙasudin fitar da magnetron tare da fitar da haske don shafa, tushen baka na cathode shi ma yana aiki, kuma duka maƙasudin rufewa ana shafa su a lokaci guda. Lokacin da abun da ke cikin kayan da aka yi amfani da su wajen fitar da magnetron da kayan da aka yi amfani da su wajen fitar da baka ya bambanta, za a iya shafa yadudduka da yawa na fim, kuma fim ɗin da tushen baka na cathode ya ajiye yana da layi ɗaya a cikin fim ɗin mai layi da yawa.
3. Tushen kathode arc yana samar da kwararar lantarki mai yawa yayin shiga cikin shafi, yana ƙara yiwuwar karo da ƙwayoyin zarra na Layer ɗin ƙarfe da aka fesa da iskar gas mai amsawa, yana inganta ƙimar ajiya, ƙimar ionization na ƙarfe, da kuma taka rawa wajen taimakawa wajen adanawa.

Tushen kathode arc wanda aka saita a cikin injin shafa magnetron sputtering yana haɗa tushen tsaftacewa, tushen shafawa, da tushen ionization, yana taka rawa mai kyau wajen inganta ingancin murfin magnetron sputtering ta hanyar amfani da kwararar electron arc a cikin plasma na arc.