Ukufakwa kwe-magnetron sputtering kwenziwa xa kukhanya, kunye noxinano oluphantsi lokukhupha kunye noxinano oluphantsi lwe-plasma kwigumbi lokugquma. Oku kwenza itekhnoloji ye-magnetron sputtering ibe neengxaki ezifana namandla aphantsi okubopha i-substrate yefilimu, izinga eliphantsi le-ionization yesinyithi, kunye nezinga eliphantsi lokufaka. Kumatshini wokugquma we-magnetron sputtering, kongezwa isixhobo sokukhupha i-arc, esinokusebenzisa ukuhamba kwe-electron ephezulu kwi-arc plasma eveliswa kukukhupha i-arc ukucoca indawo yokusebenza, Ingabandakanyeka nakwi-coating kunye ne-assistant deposition.
Yongeza umthombo wamandla okukhupha i-arc kumatshini wokugquma i-magnetron, onokuba ngumthombo omncinci we-arc, umthombo we-arc ojikelezayo, okanye umthombo we-arc we-cylindrical cathode. Ukuhamba kwe-electron okuxineneyo okuveliswa ngumthombo we-cathode arc kunokudlala ezi ndima zilandelayo kuyo yonke inkqubo yokugquma i-magnetron sputtering:
1. Coca i-workpiece. Ngaphambi kokugquma, vula umthombo we-cathode arc, njl.njl., faka i-ionize igesi nge-arc electron flow, kwaye ucoce i-workpiece ngamandla aphantsi kunye nee-argon ions ezinoxinano oluphezulu.
2. Umthombo we-arc kunye nethagethi yokulawula imagnethi zigqunywe kunye. Xa ithagethi yokutshiza imagnetron ene-glow discharge ivuliwe ukuze igqunywe, umthombo we-cathode arc nawo uyavulwa, kwaye zombini imithombo yokutshiza igqunywe ngaxeshanye. Xa ulwakhiwo lwezinto ezijoliswe kwi-magnetron sputtering kunye nezinto ezijoliswe kwi-arc source zahlukile, iileya ezininzi zefilimu zinokugqunywa, kwaye umaleko wefilimu obekwe ngumthombo we-cathode arc uphakathi kwifilimu eneeleya ezininzi.
3. Umthombo we-cathode arc ubonelela ngokuhamba kwee-electron ezinoxinano oluphezulu xa uthatha inxaxheba ekugqumeni, oko kwandisa amathuba okungqubana neeathom zefilimu yesinyithi etshisiweyo kunye neegesi zokusabela, ukuphucula izinga lokufakwa kwezinto, izinga lokufakwa kwezinto zesinyithi, kunye nokudlala indima ekuncedeni ukufakwa kwezinto.
Umthombo we-cathode arc olungiselelwe kumatshini wokugquma i-magnetron udibanisa umthombo wokucoca, umthombo wokugquma, kunye nomthombo we-ionization, udlala indima entle ekuphuculeni umgangatho wokugquma i-magnetron ngokusebenzisa ukuhamba kwe-arc electron kwi-arc plasma.
Ixesha lokuthumela: Juni-21-2023