A na-eme mkpuchi magnetron sputtering n'ime ihe na-enwu enwu, yana obere njupụta ugbu a na obere njupụta plasma n'ime ụlọ mkpuchi. Nke a na-eme ka teknụzụ magnetron sputtering nwee ọghọm dịka ike njikọ ihe nkiri dị ala, obere ọnụego ionization metal, na obere ọnụego nkwụnye. Na igwe mkpuchi magnetron sputtering, a na-agbakwunye ngwaọrụ mwepụ arc, nke nwere ike iji nnukwu njupụta electron na plasma arc nke arc discharge mepụtara iji hichaa ọrụ ahụ, Ọ nwekwara ike isonye na mkpuchi na ntinye enyemaka.
Tinye isi iyi ike mwepụta arc n'ime igwe mkpuchi magnetron sputtering, nke nwere ike ịbụ obere isi iyi arc, isi iyi planar arc akụkụ anọ, ma ọ bụ isi iyi cathode arc cylindrical. Mmiri elektrọn dị elu nke isi iyi cathode arc na-emepụta nwere ike ịrụ ọrụ ndị a na usoro dum nke mkpuchi magnetron sputtering:
1. Hichaa ihe eji arụ ọrụ ahụ. Tupu ị tee ya, gbanye isi iyi arc cathode, wdg., jiri arc electron flow mee ka gas ahụ dị ion, ma jiri obere ike na ion argon dị elu hichaa ihe eji arụ ọrụ ahụ.
2. A na-ekpuchi isi iyi arc na ihe njikwa magnetik ọnụ. Mgbe a na-arụ ọrụ ihe mgbaru ọsọ magnetron sputtering na ihe na-enwu gbaa maka mkpuchi, a na-arụkwa ọrụ isi iyi cathode arc, a na-ekpuchikwa isi iyi mkpuchi abụọ ahụ n'otu oge. Mgbe ihe mejupụtara ihe mgbaru ọsọ magnetron sputtering na ihe mgbaru ọsọ arc dị iche, enwere ike itinye ọtụtụ oyi akwa nke ihe nkiri ahụ, oyi akwa ihe nkiri ahụ nke isi iyi cathode arc debere bụ ihe dị n'etiti na ihe nkiri ọtụtụ oyi akwa.
3. Isi iyi nke cathode arc na-enye oke njupụta elektrọn mgbe ọ na-esonye na mkpuchi, na-eme ka ohere nke ịsụkọta na atọm oyi akwa ihe nkiri metal sputtered na gas reaction dịkwuo elu, na-eme ka ọnụego itinye ego dịkwuo mma, ọnụego ionization metal, ma na-arụ ọrụ n'inyere itinye ego aka.
Isi iyi cathode arc nke edobere na igwe mkpuchi magnetron sputtering na-ejikọta isi iyi nhicha, isi iyi mkpuchi, na isi iyi ionization, na-arụ ọrụ dị mma n'imeziwanye mma nke mkpuchi magnetron sputtering site na iji usoro arc electron na plasma arc.
Oge ozi: Juun-21-2023