Cov txheej txheem magnetron sputtering yog ua tiav hauv kev tso tawm lub teeb, nrog rau qhov ceev tam sim no tsawg thiab qhov ceev ntawm cov ntshav tsawg hauv chav txheej. Qhov no ua rau cov thev naus laus zis magnetron sputtering muaj qhov tsis zoo xws li lub zog sib txuas ntawm cov zaj duab xis substrate qis, qhov ceev ntawm cov hlau ionization qis, thiab qhov ceev ntawm kev tso tawm qis. Hauv lub tshuab magnetron sputtering txheej, ntxiv ib lub cuab yeej tso tawm arc, uas tuaj yeem siv cov hluav taws xob ntws siab hauv cov plasma arc tsim los ntawm kev tso tawm arc los ntxuav cov khoom ua haujlwm, Nws kuj tseem tuaj yeem koom nrog kev tso tawm txheej thiab kev pabcuam.
Ntxiv ib qho chaw fais fab arc rau hauv lub tshuab magnetron sputtering, uas tuaj yeem yog qhov chaw me me arc, qhov chaw rectangular planar arc, lossis qhov chaw cylindrical cathode arc. Cov electron flow siab uas tsim los ntawm cathode arc tuaj yeem ua lub luag haujlwm hauv qab no hauv tag nrho cov txheej txheem ntawm magnetron sputtering txheej:
1. Ntxuav cov khoom ua haujlwm. Ua ntej pleev xim, tig rau qhov chaw cathode arc, thiab lwm yam, ionize cov roj nrog arc electron flow, thiab ntxuav cov khoom ua haujlwm nrog lub zog qis thiab cov argon ions ceev ceev.
2. Lub qhov chaw arc thiab lub hom phiaj tswj hwm sib nqus tau coated ua ke. Thaum lub hom phiaj magnetron sputtering nrog lub teeb ci ntsa iab raug qhib rau txheej, lub cathode arc qhov chaw kuj raug qhib, thiab ob qho tib si txheej qhov chaw raug coated tib lub sijhawm. Thaum cov khoom sib xyaw ntawm cov khoom siv magnetron sputtering thiab cov khoom siv arc qhov chaw sib txawv, ntau txheej ntawm zaj duab xis tuaj yeem plated, thiab txheej zaj duab xis uas tso los ntawm cathode arc qhov chaw yog ib txheej hauv zaj duab xis ntau txheej.
3. Lub cathode arc qhov chaw muab cov electron ntws ceev ceev thaum koom nrog hauv txheej, ua rau muaj feem cuam tshuam nrog cov hlau zaj duab xis txheej atoms thiab cov pa roj teb, txhim kho qhov nrawm ntawm kev tso tawm, hlau ionization nrawm, thiab ua lub luag haujlwm hauv kev pab tso tawm.
Lub cathode arc qhov chaw teeb tsa hauv lub tshuab magnetron sputtering txheej txheem sib xyaw ua ke qhov chaw ntxuav, qhov chaw txheej, thiab qhov chaw ionization, ua lub luag haujlwm zoo hauv kev txhim kho qhov zoo ntawm magnetron sputtering txheej txheem los ntawm kev siv cov arc electron ntws hauv cov plasma arc.
Lub sijhawm tshaj tawm: Lub Rau Hli-21-2023