I-Magnetron sputtering coating yenziwa ngokukhishwa okukhanyayo, ngobuningi bamanje bokuphuma okuphansi kanye nobuningi be-plasma obuphansi ekamelweni lokumboza. Lokhu kwenza ubuchwepheshe be-magnetron sputtering bube nokubi njengamandla okubopha ifilimu ephansi yefilimu, izinga eliphansi le-ionization yensimbi, nezinga lokubeka eliphansi. Emshinini we-magnetron sputtering coating, idivaysi yokukhishwa kwe-arc yengezwa, engasebenzisa ukugeleza kwe-electron ephezulu-density ku-arc plasma ekhiqizwe ukukhishwa kwe-arc ukuhlanza ucezu lokusebenzela, Ingakwazi futhi ukubamba iqhaza ekuhlanganiseni nasekufakeni okuwusizo.
Engeza umthombo wamandla okukhipha i-arc emshinini wokuhlanganisa i-magnetron sputtering, okungaba umthombo we-arc omncane, umthombo we-arc owunxande we-arc, noma umthombo we-cylindrical cathode arc. Ukugeleza kwe-electron ephezulu-density okukhiqizwa umthombo we-cathode arc kungadlala izindima ezilandelayo kuyo yonke inqubo ye-magnetron sputtering coating:
1. Hlanza i-workpiece. Ngaphambi kokumboza, vula umthombo we-cathode arc, njll., yenza i-ionize igesi ngokugeleza kwe-arc electron, bese uhlanza ucezu lokusebenza ngamandla aphansi nama-argon ions aphezulu.
2. Umthombo we-arc kanye nethagethi yokulawula kazibuthe kuhlanganiswe ndawonye. Lapho i-magnetron sputtering target inokukhishwa okukhanyayo icushiwe ukuze ihlanganiswe, umthombo we-cathode arc nawo uyasebenza, futhi imithombo yomibili yokumboza iboshwe kanyekanye. Uma ukwakheka kwezinto ezihlosiwe ze-magnetron sputtering kanye nezinto ezihlosiwe zomthombo we-arc kuhlukile, izingqimba eziningi zefilimu zingafakwa, futhi ungqimba lwefilimu olufakwe umthombo we-cathode arc luyi-interlayer kufilimu enezingqimba eziningi.
3. Umthombo we-arc we-cathode uhlinzeka ngokugeleza kwe-electron ephezulu-ukuminyana lapho ubamba iqhaza ezembeni, okwandisa amathuba okungqubuzana nama-athomu ongqimba lwefilimu yensimbi efafaziwe namagesi okusabela, ukuthuthukisa izinga lokubeka, izinga le-ionization yensimbi, kanye nokudlala indima ekusizeni ukubekwa.
Umthombo we-cathode arc olungiselelwe emshinini wokuhlanganisa i-magnetron sputtering coating uhlanganisa umthombo wokuhlanza, umthombo wokumboza, nomthombo we-ionization, udlala indima enhle ekuthuthukiseni ikhwalithi ye-magnetron sputtering coating ngokusebenzisa ukugeleza kwe-arc electron ku-arc plasma.
Isikhathi sokuthumela: Jun-21-2023