I-Magnetron sputtering coating iqhutyelwa ekuphumeni okukhanyayo, kunye nokukhutshwa okuphantsi koxinzelelo lwangoku kunye nokuxinana kweplasma ephantsi kwigumbi lokugubungela. Oku kwenza itekhnoloji ye-magnetron sputtering ibe nezinto ezingeloncedo ezifana nefilimu ephantsi ye-substrate bonding force, isantya esisezantsi se-ionization yesinyithi, kunye nezinga eliphantsi lokubekwa. Kwi-magnetron sputtering coating machine, i-arc discharge device yongezwa, engasebenzisa ukuhamba kwe-electron ephezulu kwi-plasma ye-arc eyenziwa yi-arc discharge ukucoca i-workpiece, inokuthatha inxaxheba kwi-coating kunye ne-deposition yokuncedisa.
Yongeza umthombo wamandla wokukhupha i-arc kumatshini wokugquma we-magnetron, onokuba ngumthombo omncinci we-arc, umthombo we-rectangular planar arc, okanye umthombo we-cylindrical cathode arc. Ukuhamba kwe-electron yoxinaniso oluphezulu oluveliswa ngumthombo we-arc ye-cathode inokudlala indima elandelayo kuyo yonke inkqubo ye-magnetron sputtering coating:
1. Coca i-workpiece. Ngaphambi kokugquma, vula umthombo we-arc ye-cathode, njl., i-ionize igesi nge-arc electron flow, kwaye uhlambulule i-workpiece ngamandla aphantsi kunye ne-argon ions ephezulu.
2. Umthombo we-arc kunye nethagethi yolawulo lwamagnetic ihlanganiswe kunye. Xa i-magnetron sputtering target kunye nokukhutshwa okukhanyayo ivuliwe ukuze igqunywe, umthombo we-arc we-cathode nawo uyasebenza, kwaye yomibini imithombo yokugquma igqunywe ngaxeshanye. Xa ukubunjwa kwe-magnetron sputtering target material kunye ne-arc source target material iyahluka, iileya ezininzi zefilimu zinokugqithwa, kwaye ifilimu yefilimu efakwe ngumthombo we-cathode arc yi-interlayer kwifilimu ye-multi-layer.
3. Umthombo we-arc we-cathode unikezela ukuhamba kwe-electron ephezulu xa uthatha inxaxheba kwi-coating, ukwandisa amathuba okungqubana ne-athomu yefilimu ye-sputtered metal kunye ne-reaction gases, ukuphucula izinga lokubeka, izinga le-ionization yensimbi, kunye nokudlala indima ekuncediseni ukubekwa.
Umthombo we-cathode arc olungiselelwe kumatshini wokugquma we-magnetron udibanisa umthombo wokucoca, umthombo wokugquma, kunye nomthombo we-ionization, udlala indima entle ekuphuculeni umgangatho we-magnetron sputtering coating ngokusebenzisa i-arc electron flow kwi-arc plasma.
Ixesha lokuposa: Jun-21-2023