Daahan dahaadhka Magnetron waxaa lagu fuliyaa dareere dhalaalaysa, oo leh cufnaanta dareere hoose iyo cufnaanta balaasmaha hoose ee qolka dahaarka. Tani waxay ka dhigaysaa tignoolajiyada sputtering magnetron inay leedahay faa'iidooyin sida xoogga isku xidhka substrate-ka hoose ee filimka, heerka ionization birta oo hooseeya, iyo heerka dhigaalka hooseeya. Mashiinka daahan ee magnetron sputtering, qalab dheecaanka arc ayaa lagu daraa, kaas oo isticmaali kara qulqulka elektarooniga-cufnaanta sare ee balasmaha arc ee ay dhaliso dheecaanka arc si loo nadiifiyo qaybta shaqada
Ku dar il koronto oo dareere ah oo ku jirta mashiinka daahan magnetron-ka, kaas oo noqon kara il yar oo qaanso ah, il qorrax leh oo leydi ah, ama il cathode cylindrical ah. Qulqulka elektarooniga ah ee cufnaanta sare leh ee ay dhaliso isha cathode arc wuxuu ka ciyaari karaa doorarka soo socda ee habka oo dhan ee dahaarka sputtering magnetron:
1. Nadiifi qalabka shaqada. Ka hor inta daahan, shid isha cathode arc, iwm, ionize gaaska la socodka arc electron, oo nadiifi workpiece la tamar hoose iyo argon cufnaanta sare.
2. isha arc iyo bartilmaameedka kontoroolka magnetic waa la isku dahaadhay. Marka bartilmaameedka magnetron-ka ee leh dareeraha dhalaalka ah ayaa loo hawlgeliyaa daahan, isha cathode arc sidoo kale waa la hawlgeliyaa, labada ilo daahan ayaa isku mar la daboolay. Marka isku dhafka magnetron sputtering walxaha bartilmaameedka ah iyo walxaha bartilmaameedka arc ay kala duwan yihiin, lakabyo badan oo filim ah ayaa lagu dhejin karaa, lakabka filimka ee lagu keydiyo ilaha cathode arc waa dhexda filimka lakabka badan.
3. Ilaha cathode arc wuxuu bixiyaa qulqulka elektarooniga ah ee cufnaanta sare marka uu ka qaybqaadanayo daahan, kordhinta suurtogalnimada isku dhaca atomyada lakabka filimka birta ah ee firidhsan iyo gaaska falcelinta, hagaajinta heerka kaydinta, heerka ionization birta, iyo ciyaarista doorka caawinta dhigaalka.
Isha cathode arc ee lagu habeeyay mashiinka daahan dahaarka ee magnetron wuxuu isku daraa isha nadiifinta, isha daahan, iyo isha ionization, isagoo door wanaagsan ka ciyaaraya hagaajinta tayada daahan magnetron-ka iyadoo la adeegsanayo qulqulka arc electron ee balaasmaha arc.
Waqtiga boostada: Juun-21-2023