Magnetron sputtering coating inoitwa mukupenya kwekuyerera, ine yakaderera discharge ikozvino density uye kuderera kweplasma density mukamuri yekuputira. Izvi zvinoita kuti magnetron sputtering tekinoroji ive neyakaipira senge yakaderera firimu substrate bonding simba, yakaderera simbi ionization rate, uye yakaderera deposition rate. Mune magnetron sputtering coating machine, arc discharge device inowedzerwa, iyo inogona kushandisa yakakwira-density electron kuyerera muarc plasma inogadzirwa nearc discharge kuchenesa iyo workpiece, Inogona zvakare kutora chikamu mukuvhara uye yekubatsira deposition.
Wedzera arc discharge simba sosi mumushini we magnetron sputtering coating, inogona kunge iri diki arc sosi, rectangular planar arc sosi, kana cylindrical cathode arc sosi. Iyo yakakwira-density erekitironi inoyerera inogadzirwa necathode arc sosi inogona kutamba mabasa anotevera mukuita kwese kwe magnetron sputtering coating:
1. Chenesa workpiece. Usati wavhara, vhura cathode arc sosi, nezvimwewo, ionize gasi nearc electron kuyerera, uye chenesa workpiece nesimba rakaderera uye yakakwira density argon ions.
2. The arc source uye magnetic control target inoputirwa pamwechete. Kana iyo magnetron sputtering tarisiro ine kupenya inobuda ikabatidzwa kuti ipfeke, iyo cathode arc sosi inogadziriswawo, uye ese ari maviri masosi ekuputira anoputirwa panguva imwe chete. Kana kuumbwa kwemagnetron sputtering target material uye iyo arc source target material yakasiyana, akawanda layers emufirimu anogona kuputirwa, uye iyo firimu layer inoiswa necathode arc source ndeye interlayer mune yakawanda-layer firimu.
3. The cathode arc source inopa high-density erekitironi kuyerera kana uchitora chikamu mukuputira, kuwedzera mukana wekudhumhana ne sputtered metal film layer maatomu uye reaction magasi, kunatsiridza deposition rate, simbi ionization rate, uye kutamba basa kubatsira deposition.
Iyo cathode arc sosi yakagadziridzwa mune magnetron sputtering coating muchina inobatanidza sosi yekuchenesa, yekubikira sosi, uye ionization sosi, ichiita basa rakanaka mukuvandudza kunaka kweiyo magnetron sputtering coating nekushandisa arc electron kuyerera muarc plasma.
Nguva yekutumira: Jun-21-2023