Ikoranabuhanga ryo gushyiramo imirasire ya Ion

Mu by’ukuri, ikoranabuhanga ryo gushyiramo icyuma gifasha mu gukwirakwiza icyuma cya Ion ni ikoranabuhanga rihuriweho. Ni uburyo bwo gutunganya icyuma gihuza icyuma gitera icyuma cya Ion n’ikoranabuhanga ryo gushyiramo icyuma gihumeka, hamwe n’ubwoko bushya bw’ikoranabuhanga ryo gutunganya icyuma gihumeka. Uretse ibyiza byo gushyiramo icyuma gihumeka, ubu buryo bushobora gukomeza gukura icyuma icyo ari cyo cyose cy’ubugari mu bihe bikomeye byo kugenzura, kunoza imiterere y’icyuma n’icyerekezo cyacyo cyane, kongera imbaraga zo gufatana kw’icyuma/icyuma gihumeka, kunoza ubucucike bw’icyuma gihumeka, no gukora icyuma gifatanye gifite ikigereranyo cyiza cya stoichiometric hafi y’ubushyuhe bw’icyumba, harimo n’ubwoko bushya bwa filime zidashobora kuboneka ku bushyuhe bw’icyumba n’umuvuduko. Gushyiramo icyuma gihumeka ntabwo bigumana gusa ibyiza byo guteramo icyuma, ahubwo bishobora no gutwikira icyuma gihumeka hakoreshejwe icyuma gitandukanye rwose n’icyuma gihumeka.
Mu bwoko bwose bwo gushyira umwuka mu kirere no gushyira umwuka mu kirere mu buryo bwa chimique, hashobora kongerwamo imbunda z’inyongera zo gutera ibisasu kugira ngo habeho sisitemu ya IBAD, kandi hari inzira ebyiri rusange za IBAD nk'uko bigaragara ku Ishusho:

Nkuko bigaragara kuri Pic (a), isoko y'amashanyarazi akoreshwa mu gushyushya urwego rwa firime hamwe n'umuraba wa ion uva mu mbunda ya ion, bityo bigatuma ion iboneka. Akamaro ni uko ingufu n'icyerekezo bya ion bishobora guhindurwa, ariko alloy imwe cyangwa nkeya, cyangwa imvange ni byo bishobora gukoreshwa nk'isoko y'amazi, kandi buri gitutu cy'umwuka w'igice cya alloy n'imvange kiratandukanye, ibyo bigatuma bigorana kubona urwego rwa firime rw'umwimerere rw'isoko y'amazi.
Ifoto (b) igaragaza uburyo bwo gushyiramo icyuma gifasha mu gukwirakwiza icyuma cya ion beam, buzwi kandi nka double ion beam sputtering deposition, aho intego ikorwa mu bikoresho byo gutwikira icyuma cya ion beam sputtering, ibikoresho byo gukwirakwiza icyuma bikoreshwa nk'isoko. Mu gihe uyishyira ku gice cy'ubutaka, icyuma gifasha mu gukwirakwiza icyuma cya ion beam sputtering deposition kigerwaho hakoreshejwe imirasire n'indi soko ya ion. Akamaro k'ubu buryo ni uko uduce twacitsemo icyuma ubwatwo dufite ingufu runaka, bityo hakabaho gufatana neza na substrate; igice icyo ari cyo cyose cy'ikintu gishobora gushyirwamo icyuma gipfundikiye, ariko gishobora no kuba uburyo bwo gushyiramo icyuma muri filime, byoroshye guhindura imiterere ya filime, ariko ubushobozi bwo kuyishyiramo buragabanuka, intego irahenze kandi hari ibibazo nko gutandukanya icyuma.