Teknụzụ ntinye aka nke ion beam nyeere aka

N'ezie, teknụzụ Ion assisted deposition bụ teknụzụ mejupụtara. Ọ bụ usoro ọgwụgwọ ion elu nke jikọtara ntinye ion na teknụzụ ihe nkiri anwụrụ ọkụ anụ ahụ, yana ụdị usoro nhazi elu ion beam ọhụrụ. Na mgbakwunye na uru nke itinye vapor anụ ahụ, usoro a nwere ike ịbawanye ọkpụrụkpụ ihe nkiri ọ bụla n'okpuru ọnọdụ njikwa siri ike karị, melite kristal na nhazi nke oyi akwa ihe nkiri ahụ nke ọma, mee ka ike njikọta nke oyi akwa/ihe mkpuchi ihe nkiri dịkwuo elu, melite njupụta nke oyi akwa ihe nkiri ahụ, ma mepụta ihe nkiri mejupụtara nwere oke stoichiometric zuru oke na okpomọkụ ụlọ dị nso, gụnyere ụdị ihe nkiri ọhụrụ nke enweghị ike inweta na okpomọkụ ụlọ na nrụgide. Ntinye ion assisted beam anaghị ejide naanị uru nke usoro ntinye ion, kamakwa ọ nwere ike ikpuchi substrate ahụ na ihe nkiri dị iche kpamkpam na substrate.
N'ụdị niile nke itinye anwụrụ ọkụ na itinye anwụrụ ọkụ kemịkalụ, enwere ike itinye otu egbe ion bombardment auxiliary iji mepụta sistemụ IBAD, enwerekwa usoro IBAD abụọ n'ozuzu dịka ndị a, dịka egosiri na Foto a:

Dịka egosiri na Pic (a), a na-eji isi iyi ikuku elektrọn iji mee ka oyi akwa ihe nkiri ahụ pụta ìhè site na iji ion nke sitere na egbe ion, si otú a na-ahụ na ion na-enyere aka itinye ihe. Uru ya bụ na enwere ike ịgbanwe ike na ntụziaka nke ion, mana naanị otu ma ọ bụ obere alloy, ma ọ bụ compound nwere ike iji dị ka isi iyi ikuku, nrụgide uzuoku nke akụkụ alloy na compound dị iche, nke na-eme ka o sie ike inweta oyi akwa ihe nkiri nke ihe mejupụtara isi iyi ikuku mbụ.
Foto (b) na-egosi ebe a na-etinye ion beam sputtering-assisted deposition, nke a makwaara dị ka ebe a na-etinye ion beam sputtering, ebe a na-eji ihe mkpuchi ion beam sputtering eme ihe, a na-eji ngwaahịa sputtering eme ihe dị ka isi iyi. Mgbe a na-etinye ya na substrate, a na-enweta ihe nchekwa ion beam sputtering enyere site na radieshon na isi iyi ion ọzọ. Uru nke usoro a bụ na ihe ndị a na-etinye n'onwe ha nwere ike ụfọdụ, yabụ enwere ike ijikọ nke ọma na substrate; ihe ọ bụla dị na ihe mgbaru ọsọ nwere ike ịbụ mkpuchi sputtered, mana ọ nwekwara ike ịbụ mmeghachi omume na-agbapụta n'ime ihe nkiri ahụ, ọ dị mfe ịgbanwe ihe mejupụtara ihe nkiri ahụ, mana arụmọrụ ya dị ala, ihe mgbaru ọsọ dị oke ọnụ ma enwere nsogbu dị ka nhọrọ sputtering.