Qhov tseeb, Ion beam pab deposition technology yog ib qho composite technology. Nws yog ib qho composite surface ion treatment technique uas sib xyaws ua ke ion implantation thiab physical vapor deposition film technology, thiab ib hom ion beam tshiab optimization technique. Ntxiv rau qhov zoo ntawm physical vapor deposition, cov txheej txheem no tuaj yeem txuas ntxiv loj hlob txhua yam thickness film nyob rau hauv cov xwm txheej tswj hwm nruj dua, txhim kho crystallinity thiab orientation ntawm cov zaj duab xis txheej ntau dua, ua kom lub zog adhesion ntawm cov zaj duab xis txheej/substrate, txhim kho qhov denseness ntawm cov zaj duab xis txheej, thiab synthesize compound films nrog cov stoichiometric ratios zoo tagnrho ntawm ze chav tsev kub, suav nrog cov hom zaj duab xis tshiab uas tsis tuaj yeem tau txais ntawm chav tsev kub thiab siab. Ion beam pab deposition tsis yog tsuas yog khaws cov txiaj ntsig ntawm cov txheej txheem ion implantation, tab sis kuj tuaj yeem npog lub substrate nrog ib zaj duab xis sib txawv kiag li ntawm lub substrate.
Hauv txhua yam kev tso pa tawm ntawm lub cev thiab cov pa tshuaj lom neeg, ib pawg phom tua hluav taws xob tuaj yeem ntxiv los tsim ib qho IBAD system, thiab muaj ob txoj hauv kev IBAD dav dav raws li hauv qab no, raws li pom hauv Pic:
Raws li pom hauv Pic (a), siv lub zog hluav taws xob los ua kom cov txheej zaj duab xis ci nrog lub zog ion uas tawm los ntawm rab phom ion, yog li ua kom muaj kev pab tso cov ion. Qhov zoo yog tias lub zog thiab kev taw qhia ntawm lub zog ion tuaj yeem hloov kho tau, tab sis tsuas yog ib qho lossis tsawg dua ntawm cov hlau sib xyaw, lossis cov khoom sib xyaw tuaj yeem siv ua qhov chaw ua kom yaj, thiab txhua lub zog ntawm cov khoom sib xyaw thiab cov khoom sib xyaw sib txawv, uas ua rau nws nyuaj rau kom tau txais cov txheej zaj duab xis ntawm cov khoom sib xyaw ua kom yaj thawj.
Daim duab (b) qhia txog kev siv ion beam sputtering-assisted deposition, uas tseem hu ua double ion beam sputtering deposition, uas lub hom phiaj ua los ntawm cov khoom siv ion beam sputtering txheej, cov khoom sputtering siv ua qhov chaw. Thaum tso nws rau ntawm lub substrate, ion beam sputtering assisted deposition yog ua tiav los ntawm kev irradiation nrog lwm qhov chaw ion. Qhov zoo ntawm txoj kev no yog tias cov khoom me me sputtered lawv tus kheej muaj qee lub zog, yog li muaj kev sib txuas zoo dua nrog lub substrate; txhua yam khoom ntawm lub hom phiaj tuaj yeem yog sputtered txheej, tab sis kuj tuaj yeem yog reaction sputtering rau hauv zaj duab xis, yooj yim kho cov khoom sib xyaw ntawm zaj duab xis, tab sis nws cov txiaj ntsig deposition qis, lub hom phiaj kim thiab muaj teeb meem xws li kev xaiv sputtering.
Lub sijhawm tshaj tawm: Kaum Ib Hlis-08-2022