Ion beam yafashaga tekinoroji yo kubitsa

Mubyukuri, Ion beam yafashijwe tekinoroji yo kubitsa ni tekinoroji ihuriweho. Nuburyo bukomatanyije bwo kuvura ion ikomatanya ikomatanya ion hamwe nubuhanga bwa firime yohereza imyuka yumubiri, hamwe nubwoko bushya bwa tekinike ya ion beam tekinike. Usibye ibyiza byo guhumeka imyuka yumubiri, ubu buhanga burashobora gukomeza gukura firime iyo ari yo yose yubugari mugihe gikabije cyo kugenzura, kunoza kristu no kwerekana icyerekezo cya firime kuburyo bugaragara, kongera imbaraga zo gufatira hamwe kwa firime / substrate, kunoza ubucucike bwurwego rwa firime, no guhuza firime zivanze hamwe nubushuhe bwiza bwa stoichiometrici mubushyuhe bwicyumba kandi bidashobora kuboneka mubyumba bya firime bidashobora kuboneka. Ion beam yafashijwe kubitsa ntibigumana gusa ibyiza byuburyo bwo gutera ion, ariko birashobora no gutwikira substrate hamwe na firime itandukanye rwose na substrate.
Ubwoko bwose bwimyuka yumwuka hamwe nubumara bwa chimique, hashobora kongerwamo imbunda ya ion ibisasu bifashisha kugirango habeho sisitemu ya IBAD, kandi hariho inzira ebyiri rusange za IBAD kuburyo bukurikira, nkuko bigaragara kuri Pic:

Nkuko bigaragara muri Pic (a), isoko ya elegitoroniki ya elegitoronike ikoreshwa mu kurasa urumuri rwa firime hamwe n’ibiti bya ion biva mu mbunda ya ion, bityo bikamenya ko ibiti bya ion bifasha kubitsa. Akarusho nuko ingufu za ion beam nicyerekezo bishobora guhinduka, ariko gusa icyuma kimwe cyangwa kigarukira gusa, cyangwa ibivanze bishobora gukoreshwa nkisoko yo guhumeka, kandi buri muvuduko wumwuka wumuyaga wibintu bivangwa nuruvange biratandukanye, bigatuma bigorana kubona firime ya firime yibigize umwimerere.
Pic (b) yerekana ion beam sputtering-ifashijwe kubitsa, bizwi kandi ko byitwa ion beam sputtering deposition, aho intego ikozwe muri ion beam sputtering coating material, ibicuruzwa biva mu mahanga bikoreshwa nkisoko. Mugihe ubishyize kuri substrate, ion beam sputtering ifasha kubitsa bigerwaho no kurasa hamwe nandi masoko ya ion. Ibyiza byubu buryo nuko uduce duto duto ubwabo dufite imbaraga runaka, bityo hakabaho gufatana neza na substrate; ikintu icyo ari cyo cyose kigize intego gishobora gusukwa, ariko nanone gishobora kuba reaction zisohoka muri firime, byoroshye guhindura imiterere ya firime, ariko uburyo bwo kuyishyira hasi ni buke, intego ihenze kandi hariho ibibazo nko gutoranya guhitamo.