Magnetron sputtering coating ikorwa mugusohora urumuri, hamwe nubucucike buke bwa plasma nubucucike buke bwa plasma mubyumba. Ibi bituma tekinoroji ya magnetron ifite ibibi nkibibi nka firime nkeya ya substrate ihuza imbaraga, igipimo gito cya ionisiyoneri, nigipimo cyo hasi. Muri mashini ya magnetron isuka, hongeweho igikoresho cyo gusohora arc, gishobora gukoresha umuvuduko mwinshi wa electron muri plasma ya arc iterwa no gusohora arc kugirango isukure igihangano, Irashobora kandi kwitabira gutwikira no kubitsa.
Ongeramo imbaraga za arc zisohora ingufu mumashini ya magnetron sputtering coating, ishobora kuba isoko nto ya arc, urukiramende rwa planar arc isoko, cyangwa isoko ya cathode ya silindrike. Umuvuduko mwinshi wa electron ukomoka kuri cathode arc isoko irashobora gukina inshingano zikurikira mugikorwa cyose cya magnetron sputtering coating:
1. Sukura urupapuro rwakazi. Mbere yo gutwikira, fungura inkomoko ya cathode arc, nibindi, ionize gaze hamwe na electron electronique, hanyuma usukure igihangano ukoresheje ingufu nke hamwe na ion nyinshi.
2. Inkomoko ya arc hamwe nintego yo kugenzura ibintu bifatanyirijwe hamwe. Iyo magnetron isunika intego hamwe no gusohora glow ikora mugutwikira, inkomoko ya cathode arc nayo irakora, kandi amasoko yombi yatwikiriye icyarimwe. Iyo ibice bya magnetron bisohora ibikoresho nibikoresho bya arc bitandukanye, ibice byinshi bya firime birashobora gushyirwaho, kandi firime ya firime yabitswe na cathode arc isoko ni umuhuza muri firime nyinshi.
3.
Inkomoko ya cathode arc yagizwe mumashini ya magnetron sputtering coating imashini ihuza isoko yisuku, isoko yatwikiriye, hamwe nisoko ya ionisiyoneri, bigira uruhare runini mukuzamura ireme rya magnetron sputtering coating ukoresheje arc electron electronique muri arc plasma.
Igihe cyo kohereza: Jun-21-2023