Ukadaulo wa ion wathandizira kuyika

M'malo mwake, ukadaulo wa Ion beam wothandizira deposition ndiukadaulo wophatikizika. Ndi njira yophatikizira yopangira ma ion yophatikizira kuyika kwa ion ndiukadaulo wamakanema oyika nthunzi, ndi mtundu watsopano waukadaulo wa ion beam pamwamba kukhathamiritsa. Kuphatikiza pa ubwino wa maonekedwe a nthunzi, njira iyi imatha kukulitsa filimu iliyonse yamtundu uliwonse pansi pazikhalidwe zovuta kwambiri, kusintha maonekedwe a crystallinity ndi maonekedwe a filimuyi kwambiri, kuwonjezera mphamvu yomatira ya filimu yosanjikiza / gawo lapansi, kupititsa patsogolo kusanjikiza kwa filimuyo, ndi kupanga mafilimu apawiri okhala ndi ma ratios abwino a stoichiometric pafupi ndi kutentha kwa chipinda, kuphatikizapo kutentha kwa chipinda, kuphatikizapo kupanikizika kwatsopano. Kuyika kwa ion mtengo sikumangosunga ubwino wa ion implantation, komanso kuphimba gawo lapansi ndi filimu yosiyana kwambiri ndi gawo lapansi.
Mumitundu yonse yamtundu wa nthunzi wakuthupi komanso kuyika kwa nthunzi wamankhwala, mfuti zothandizira za bombardment ion zitha kuwonjezeredwa kuti zipange dongosolo la IBAD, ndipo pali njira ziwiri za IBAD motere, monga zikuwonetsedwa mu Pic:

Monga zikuwonetsedwera mu Pic (a), gwero la evaporation la elekitironi limagwiritsidwa ntchito kuwunikira wosanjikiza wa filimuyo ndi mtengo wa ayoni wotuluka mumfuti ya ion, pozindikira kuti mtengo wothandizidwa ndi ion. Ubwino ndi kuti ion mtengo mphamvu ndi malangizo akhoza kusinthidwa, koma aloyi limodzi kapena ochepa, kapena pawiri angagwiritsidwe ntchito ngati gwero evaporation, ndi aliyense nthunzi kuthamanga kwa aloyi chigawo chimodzi ndi pawiri ndi osiyana, zomwe zimapangitsa kuti zikhale zovuta kupeza wosanjikiza filimu wa choyambirira evaporation gwero zikuchokera.
Chithunzi (b) chikuwonetsa chitsulo cha ion mtengo sputtering-assisted deposition, chomwe chimadziwikanso kuti double ion beam sputtering deposition, momwe chandamale chimapangidwa ndi zinthu zokutira za ion, zomwe zimagwiritsidwa ntchito ngati gwero. Kuyika pa gawo lapansi, ion mtengo sputtering wothandizira deposition imatheka ndi kuwala ndi gwero lina ion. Ubwino wa njirayi ndikuti particles sputtered okha ali ndi mphamvu inayake, kotero pali bwino adhesion ndi gawo lapansi; chigawo chilichonse cha chandamale akhoza sputtered ❖ kuyanika, komanso kungakhale anachita sputtering mu filimu, zosavuta kusintha zikuchokera filimu, koma mafunsidwe dzuwa ndi otsika, chandamale ndi okwera mtengo ndipo pali mavuto monga sputtering kusankha.