Kupititsa patsogolo Kupaka kwa Magnetron Sputtering ndi Arc Discharge Power Supply

Magnetron sputtering ❖ kuyanika ikuchitika kuwala kumaliseche, ndi otsika kumaliseche panopa kachulukidwe ndi otsika plasma kachulukidwe mu chipinda ❖ kuyanika. Izi zimapangitsa ukadaulo wa magnetron sputtering kukhala ndi zovuta monga mphamvu yolumikizira gawo laling'ono la filimu, kutsika kwachitsulo cha ionization, komanso kutsika kotsika. Mu makina opaka magnetron sputtering, chipangizo chotulutsa arc chimawonjezedwa, chomwe chingagwiritse ntchito ma elekitironi othamanga kwambiri mu plasma ya arc yopangidwa ndi arc discharge kuyeretsa workpiece, Ingathenso kutenga nawo mbali pakupaka ndi kuyika kothandizira.

Onjezani gwero lamagetsi otulutsa arc mumakina okutikira a magnetron, omwe amatha kukhala gwero laling'ono la arc, gwero la arc planar, kapena gwero la cylindrical cathode arc. Kuthamanga kwa ma elekitironi okwera kwambiri komwe kumapangidwa ndi gwero la cathode arc kumatha kugwira ntchito zotsatirazi munjira yonse ya zokutira za magnetron:
1. Chotsani chogwirira ntchito. Musanayambe kupaka, yatsani cathode arc gwero, etc., ionize mpweya ndi arc electron otaya, ndi kuyeretsa workpiece ndi otsika mphamvu ndi mkulu kachulukidwe ayoni argon.
2. Gwero la arc ndi chandamale chowongolera maginito zimakutidwa pamodzi. Pamene magnetron sputtering chandamale ndi kumaliseche kuwala ndi adamulowetsa kwa ❖ kuyanika, cathode arc gwero komanso adamulowetsa, ndipo magwero ❖ kuyanika ndi imodzi yokutidwa. Pamene zikuchokera magnetron sputtering chandamale chandamale ndi arc gwero chandamale zakuthupi ndi osiyana, angapo zigawo za filimu akhoza yokutidwa, ndi filimu wosanjikiza waikamo ndi cathode arc gwero ndi interlayer mu Mipikisano wosanjikiza filimu.
3. The cathode arc gwero amapereka mkulu-kachulukidwe elekitironi otaya pamene nawo ❖ kuyanika, kuonjezera Mwina kugunda ndi sputtered zitsulo filimu wosanjikiza maatomu ndi mpweya anachita, kuwongolera mafunsidwe mlingo, zitsulo ionization mlingo, ndi kuchita mbali kuthandiza mafunsidwe.

Gwero la cathode arc lomwe limapangidwa mu makina opaka a magnetron sputtering limaphatikiza gwero loyeretsera, gwero la zokutira, ndi gwero la ionization, lomwe limagwira ntchito yabwino pakuwongolera makulidwe a magnetron sputtering pogwiritsa ntchito ma arc electron kutuluka mu plasma ya arc.