Ko te whakakikoruatanga o te Magnetron sputtering ka mahia i roto i te rere mura, me te iti o te rerenga o naianei me te iti o te plasma kiato i roto i te ruuma paninga. Na tenei ka whai huakore te hangarau o te magnetron sputtering penei i te iti o te kaha honohono o te tïpako kiriata, te iti o te reiti ionization whakarewa, me te iti o te reiti waipara. I roto i te miihini whakakikorua magnetron sputtering, ka taapirihia he taputapu tuku arc, ka taea te whakamahi i te rere irahiko teitei i roto i te arc plasma i hangaia e te arc discharge ki te horoi i te mahi, Ka taea hoki te whakauru ki te whakakikorua me te whakauru awhina.
Tāpirihia he puna hiko tuku pewa ki roto i te miihini whakakikorua i te magnetron sputtering, ka taea he puna pewa iti, he puna pewa tapawha, he puna pewa cathode porotakaroa ranei. Ka taea e te rere irahiko kiato teitei e te puna arc cathode te mahi i nga mahi e whai ake nei i roto i nga mahi katoa o te whakakikorua o te magnetron sputtering:
1. Horoia te taputapu mahi. I mua i te paninga, whakakāhia te puna arc cathode, me etahi atu, katote i te hau ki te rere irahiko arc, ka horoi i te mea mahi ki te iti te kaha me te katote argon kiato teitei.
2. Ka whakakikoruatia te puna arc me te taumata mana autō. I te wa e whakahohehia ana te whainga o te magnetron sputtering me te rere mura mo te paninga, ka whakahohehia ano te puna pewa cathode, ka pania nga puna whakakikorua e rua i te wa kotahi. A, no te te hanganga o te magnetron sputtering rauemi ūnga he rerekē, me te rauemi ūnga pūtake pewa he rerekē, ka taea te whakakikoruatia nga paparanga maha o te kiriata, me te paparanga kiriata whakatakotoria e te puna pewa cathode he interlayer i roto i te kiriata maha-apa.
3. Ko te puna arc cathode e whakarato ana i te rere irahiko teitei i te wa e uru ana ki te paninga, te whakanui ake i te tupono o te tukinga ki nga ngota paparanga kiriata whakarewa me nga hau tauhohenga, te whakapai ake i te reiti waipara, te reeti katote whakarewa, me te whai waahi ki te awhina i te waipara.
Ko te puna arc cathode i whirihorahia i roto i te miihini whakakikorua magnetron sputtering e whakauru ana i te puna horoi, te puna whakakikorua, me te puna ionization, he pai te mahi ki te whakapai ake i te kounga o te whakakikorua o te magnetron sputtering ma te whakamahi i te rere irahiko arc i roto i te plasma arc.
Wā tuku: Hune-21-2023