A na-eme mkpuchi mkpuchi Magnetron na-egbuke egbuke, yana njupụta dị ugbu a dị ala na njupụta plasma dị ala na ụlọ mkpuchi. Nke a na-eme ka teknụzụ magnetron sputtering nwere ọghọm dị ka ike njikọta ihe nkiri dị ala, ọnụego ionization ọla dị ala, yana ọnụego ntinye dị ala. N'ime igwe mkpuchi magnetron sputtering, a na-agbakwunye ngwaọrụ na-agbapụta arc, nke nwere ike iji njupụta electron dị elu na plasma arc nke arc na-eme ka ọ dị ọcha workpiece, Ọ nwekwara ike itinye aka na mkpuchi na ntinye enyemaka.
Tinye isi iyi ike na-agbapụta arc na igwe mkpuchi magnetron sputtering, nke nwere ike ịbụ obere isi iyi arc, isi mmalite akụkụ akụkụ akụkụ anọ, ma ọ bụ isi iyi cathode arc cylindrical. Ngwunye eletrọn dị elu nke sitere na isi iyi cathode arc nwere ike rụọ ọrụ ndị a na usoro ihe mkpuchi magnetron dum:
1. Hichaa workpiece. Tupu mkpuchi, gbanye cathode arc isi iyi, wdg, ionize gas na arc electron eruba, na hichaa workpiece na obere ume na elu njupụta argon ion.
2. A na-ejikọta isi iyi arc na njikwa magnetik ọnụ. Mgbe a na-eme ka ebumnobi magnetron na-agbapụta ọkụ na-egbuke egbuke maka mkpuchi, a na-arụkwa ọrụ cathode arc, ma na-ekpuchi ebe mkpuchi abụọ ahụ n'otu oge. Mgbe ihe mejupụtara magnetron sputtering lekwasịrị anya ihe dị iche iche na arc isi iyi ihe dị iche iche, ọtụtụ n'ígwé nke ihe nkiri nwere ike plated, na fim oyi akwa debere site cathode arc isi iyi bụ interlayer na multi-layer film.
3. The cathode arc isi iyi na-enye elu-njupụta electron eruba mgbe na-ekere òkè na mkpuchi, na-amụba ihe gbasara nke puru omume nke nkukota na sputtered metal film oyi akwa atom na mmeghachi omume gas, na-eme ka deposition ọnụego, metal ionization ọnụego, na-egwu a ọrụ na-enyere deposition.
Isi iyi cathode arc ahaziri na igwe mkpuchi magnetron na-ejikọta isi iyi nhicha, isi iyi mkpuchi, na isi iyi ionization, na-arụ ọrụ dị mma n'ịkwalite ogo mkpuchi magnetron sputtering site na iji arc electron eruba na plasma arc.
Oge nzipu: Jun-21-2023