Qhov tseeb, Ion beam assisted deposition technology yog cov cuab yeej sib xyaw. Nws yog cov txheej txheem kev kho deg ion sib xyaw ua ke nrog ion implantation thiab lub cev vapor deposition zaj duab xis thev naus laus zis, thiab hom tshiab ntawm ion beam nto optimization txheej txheem. Ntxiv nrog rau qhov zoo ntawm lub cev vapor deposition, cov txheej txheem no tuaj yeem loj hlob txhua qhov tuab ntawm zaj duab xis nyob rau hauv kev tswj hwm nruj dua, txhim kho crystallinity thiab orientation ntawm zaj duab xis txheej ntau dua, ua kom lub zog adhesion ntawm cov zaj duab xis txheej / substrate, txhim kho qhov ntom ntawm zaj duab xis txheej, thiab ua ke cov yeeb yaj kiab sib xyaw nrog cov yeeb yaj kiab zoo tshaj plaws stoichiometric tsis tuaj yeem nyob ze ntawm chav tsev kub thiab cov yeeb yaj kiab. Ion beam pab deposition tsis tsuas yog khaws qhov zoo ntawm ion implantation txheej txheem, tab sis kuj yuav npog lub substrate nrog ib tug txawv kiag li zaj duab xis los ntawm lub substrate.
Nyob rau hauv txhua yam ntawm lub cev vapor deposition thiab tshuaj vapor deposition, ib txheej ntawm auxiliary bombardment ion phom tuaj yeem raug ntxiv los ua ib qho IBAD system, thiab muaj ob txoj kev IBAD dav dav raws li hauv qab no, raws li qhia hauv Pic:
Raws li pom nyob rau hauv Pic (a), ib tug electron beam evaporation qhov chaw yog siv los irradiate zaj duab xis txheej nrog lub ion beam emitted los ntawm ion phom, yog li paub ion beam pab deposition. Qhov kom zoo dua yog tias ion beam lub zog thiab kev taw qhia tuaj yeem hloov kho, tab sis tsuas yog ib qho los yog tsawg alloy, los yog cov khoom sib xyaw tuaj yeem siv los ua cov evaporation qhov chaw, thiab txhua qhov vapor siab ntawm cov khoom siv alloy thiab cov khoom sib txawv sib txawv, uas ua rau nws nyuaj rau kom tau txais cov zaj duab xis txheej ntawm thawj evaporation qhov chaw muaj pes tsawg leeg.
Pic (b) qhia txog ion beam sputtering-pab deposition, uas tseem hu ua ob chav ion beam sputtering deposition, nyob rau hauv uas lub hom phiaj ua los ntawm ion beam sputtering txheej khoom, sputtering khoom yog siv los ua qhov chaw. Thaum tso nws rau ntawm lub substrate, ion beam sputtering assisted deposition yog tiav los ntawm irradiation nrog lwm qhov chaw ion. Qhov kom zoo dua ntawm txoj kev no yog tias cov sputtered hais lawv tus kheej muaj qee lub zog, yog li muaj qhov zoo dua adhesion nrog substrate; txhua yam ntawm lub hom phiaj tuaj yeem yog sputtered txheej, tab sis kuj tuaj yeem ua cov tshuaj tiv thaiv sputtering rau hauv zaj duab xis, yooj yim los kho cov muaj pes tsawg leeg ntawm cov yeeb yaj kiab, tab sis nws qhov kev tso tawm tsis zoo, lub hom phiaj yog kim thiab muaj teeb meem xws li xaiv sputtering.
Post lub sij hawm: Nov-08-2022