Ion beam ya taimaka fasahar sakawa

Haƙiƙa, fasahar jibgewa ta ion katako fasaha ce mai haɗaka. Dabarar jiyya ce ta haɗaɗɗun ion da ke haɗa ion implantation da fasahar fim ɗin tururi ta jiki, da sabon nau'in fasahar inganta yanayin ion katako. Bugu da kari ga abũbuwan amfãni daga jiki tururi jijjiga, wannan dabara iya ci gaba da girma duk wani kauri film a karkashin mafi stringent iko yanayi, inganta crystallinity da fuskantarwa na fim Layer more muhimmanci, ƙara da mannewa da fim Layer / substrate, inganta denseness na fim Layer, da kuma hada fili fina-finai tare da manufa stoichiometric rabo a kusa da dakin zafin jiki, ciki har da sabon nau'in ba za a iya samu a cikin dakin zafin jiki, ciki har da sabon iri. Ion katako da aka ba da taimako ba wai kawai yana riƙe fa'idodin tsarin dasa ion ba, amma kuma yana iya rufe substrate tare da fim ɗin mabanbanta da substrate.
A cikin kowane nau'i na tururi na jiki da kuma iskar sinadarai, za'a iya ƙara saitin bindigogi na bama-bamai don samar da tsarin IBAD, kuma akwai matakai guda biyu na IBAD kamar haka, kamar yadda aka nuna a cikin Hoton:

Kamar yadda aka nuna a cikin Pic (a), ana amfani da tushen ƙafewar igiyar lantarki don haskaka saman fim ɗin tare da igiyar ion da ke fitowa daga gun ion, don haka fahimtar ion katako yana taimakawa jigo. Fa'idar ita ce, ana iya daidaita makamashin ion katako da shugabanci, amma kawai guda ɗaya ko iyakataccen gami, ko fili za a iya amfani da shi azaman tushen evaporation, kuma kowane tururi na ɓangaren gami da fili ya bambanta, wanda ya sa ya zama da wahala a sami Layer na fim na asalin tushen ƙaya.
Hoton (b) yana nuna ion katako sputtering-taimakawa ajiya, wanda kuma aka sani da ninki biyu ion bim sputtering adibas, a cikin abin da manufa sanya na ion katako sputtering kayan shafa, da sputtering kayayyakin da ake amfani da matsayin tushen. Yayin da ake ajiye shi a kan ƙasa, ion beam sputtering taimaka aji yana samuwa ta hanyar sakawa a iska tare da wani tushen ion. Amfanin wannan hanya shine cewa ƙwayoyin da aka zubar da kansu suna da wani makamashi, don haka akwai mafi kyawun mannewa tare da substrate; kowane bangare na manufa za a iya sputtered shafi, amma kuma zai iya zama dauki sputtering a cikin fim, da sauki daidaita abun da ke ciki na fim, amma da jita-jita yadda ya dace yana da ƙasa, manufa yana da tsada kuma akwai matsaloli kamar zaɓe sputtering.