1. Theshafan ƙafewar injinTsarin ya haɗa da ƙafewar kayan fim, jigilar ƙwayoyin tururi a cikin babban injin, da kuma tsarin nucleation da haɓakar ƙwayoyin tururi a saman aikin.
2. Matakin ajiyar iska na rufin tururin iska yana da girma, gabaɗaya 10-510-3Pa. Hanya mai 'yanci ta ƙwayoyin iskar gas tana da girman mita 1 ~ 10, wanda ya fi nisan da ke tsakanin tushen ƙafewar zuwa wurin aiki, wannan nisan ana kiransa nisan ƙafewar, galibi 300 ~ 800mm. Ƙwayoyin da ke rufewa ba sa karo da ƙwayoyin iskar gas da ƙwayoyin tururi kuma suna isa wurin aiki.
3. Layin rufewar vacuum ba plating bane na rauni, kuma atoms ɗin tururin suna tafiya kai tsaye zuwa wurin aiki a ƙarƙashin babban injin tsabtace iska. Gefen da ke fuskantar tushen evacuation akan kayan aikin ne kawai zai iya samun layin fim ɗin, kuma gefen da bayan kayan aikin da kyar ne zai iya samun layin fim ɗin, kuma layin fim ɗin yana da ƙarancin plating.
4. Ƙarfin ƙwayoyin da ke cikin layurar shafa iskar gas yana da ƙasa, kuma ƙarfin da ke isa ga aikin shine ƙarfin zafi da ƙafewar ke ɗauka. Tunda aikin ba ya nuna son kai yayin shafa iskar gas, ƙwayoyin ƙarfe suna dogara ne kawai akan zafin ƙafewar iska yayin ƙafewar iska, zafin ƙafewar yana 1000 ~ 2000 °C, kuma ƙarfin da ake ɗauka yana daidai da 0.1 ~ 0.2eV, don haka kuzarin ƙwayoyin fim ɗin yana da ƙasa, ƙarfin haɗin da ke tsakanin layurar fim ɗin da matrix ƙarami ne, kuma yana da wuya a samar da rufin mahaɗi.
5. Tsarin rufewar iskar gas yana da tsari mai kyau. Tsarin rufewar iskar gas yana samuwa ne a ƙarƙashin babban injin, kuma barbashin fim ɗin da ke cikin tururin suna da sikelin atomic, suna samar da ƙaramin core a saman aikin.
Lokacin Saƙo: Yuni-14-2023