Haɓaka Rufin Magnetron Sputtering tare da Samar da Wutar Arc

Ana yin suturar sputter na Magnetron a cikin fitarwa mai haske, tare da ƙarancin fitarwa na yanzu da ƙarancin ƙarancin plasma a cikin ɗakin rufi. Wannan ya sa fasahar sputtering magnetron suna da rashin amfani kamar ƙananan ƙarfin haɗin gwiwar fim, ƙarancin ionization na ƙarfe, da ƙarancin ƙima. A cikin na'ura mai sputtering magnetron sputtering, an ƙara na'urar fitarwa na baka, wanda zai iya amfani da kwararar wutar lantarki mai girma a cikin plasma na arc da aka samar ta hanyar fitar da arc don tsaftace kayan aikin, Hakanan yana iya shiga cikin sutura da ajiyar taimako.

Ƙara tushen wutar lantarki mai fitar da baka a cikin na'ura mai sputtering na magnetron, wanda zai iya zama ƙaramar tushen baka, tushen baka mai siffar rectangular, ko tushen tushen baka na silinda. Matsakaicin kwararar wutar lantarki da tushen cathode arc ya haifar zai iya taka rawa masu zuwa a cikin gabaɗayan aikin suturar magnetron sputtering:
1. Tsaftace kayan aikin. Kafin shafi, kunna cathode baka source, da dai sauransu, ionize da gas tare da baka electron kwarara, da kuma tsaftace workpiece da low makamashi da kuma high yawa argon ions.
2. Tushen baka da maƙasudin kulawa da maganadisu suna mai rufi tare. Lokacin da aka kunna maƙasudin sputtering magnetron tare da fitarwa mai haske don sutura, tushen cathode arc kuma ana kunna shi, kuma duka tushen rufin suna mai rufi lokaci guda. Lokacin da abun da ke ciki na magnetron sputtering manufa abu da baka tushen manufa abu ne daban-daban, mahara yadudduka na fim za a iya plated, da kuma fim Layer ajiye ta cathode arc tushen ne interlayer a cikin Multi-Layer fim.
3. The cathode baka Madogararsa samar high-yawa electron kwarara a lokacin da shiga a shafi, kara da yiwuwar karo tare da sputtered karfe fim Layer atom da dauki gas, inganta Deposition kudi, karfe ionization kudi, da kuma taka rawa a taimaka ajiya.

The cathode baka tushen kaga a cikin magnetron sputtering shafi na'ura hadedde wani tsaftacewa tushen, shafi tushen, da kuma ionization source, taka mai kyau rawa a inganta ingancin magnetron sputtering shafi ta amfani da baka electron kwarara a cikin arc plasma.