1) Ama-Cylindrical target anesilinganiso sokusetshenziswa esiphezulu kune-planar target. Enqubweni yokumboza, kungakhathaliseki ukuthi uhlobo lwe-rotary magnetic noma uhlobo lwe-rotary tube sputtering target, zonke izingxenye zobuso be-target target zidlula njalo endaweni yokumpompa ekhiqizwe phambi kwe-magnet ehlala njalo ukuze zithole ukumpompa kwe-cathode, futhi i-target ingaphonswa ngokulinganayo, futhi izinga lokusetshenziswa kwe-target liphezulu. Izinga lokusetshenziswa kwezinto eziqondiwe licishe libe ngu-80% ~ 90%.
2) Ama-Cylindrical target ngeke kube lula ukukhiqiza "ubuthi obuqondiwe". Ngesikhathi senqubo yokumboza, ubuso be-target tube buhlala buhlatshwa futhi buqoshwe ngama-ion, futhi akulula ukuqoqa ama-oxide amakhulu kanye namanye amafilimu okuvikela ebusweni, futhi akulula ukukhiqiza "ubuthi obuqondiwe".
3) Isakhiwo se-rotary target target cylindrical sputtering target silula futhi kulula ukuyifaka.
4) Izinto zeshubhu eliqondiwe eliyi-cylindrical zinezinhlobo ezahlukene. ithagethi eliyi-planar elinokupholisa amanzi ngqo okuqondiwe kwensimbi, kanti ezinye azikwazi ukucutshungulwa futhi zakheke ama-cylindrical target, njengethagethi ye-In2-SnO2, njll. ngezinto ezimpushana zokucindezela okushisayo kwe-isostatic ukuze kutholakale ama-target afana ne-plate, ngoba usayizi awukwazi ukwenziwa ube mkhulu, futhi ube buthakathaka, ngakho-ke kuyadingeka ukusebenzisa indlela ye-brazing kanye ne-backplate yethusi ukuze kuhlanganiswe bese kufakwa esisekelweni esiqondiwe. Ngaphezu kwamapayipi ensimbi, ama-target e-columnar angafuthwa ebusweni bamapayipi ensimbi engagqwali ngezinto ezahlukahlukene ezidinga ukumbozwa, njenge-Si, i-Cr, njll.
Njengamanje, isilinganiso sama-cylindrical target okumboza ekukhiqizweni kwezimboni siyanda. Ama-cylindrical target awasebenzisi nje kuphela emshinini wokumboza oqondile kodwa futhi asetshenziswa emshinini wokumboza ogoqekayo. Eminyakeni yamuva nje, ama-planar twin target athathelwa indawo kancane kancane yi-Cylindrical twin target.
——Lesi sihloko sikhishwe yiGuangdong Zhenhua Technology,umenzi wemishini yokumboza ebonakalayo.
Isikhathi sokuthunyelwe: Meyi-11-2023