1) Iithagethi zeCylindrical zinezinga eliphezulu lokusetyenziswa kuneethagethi zeplanar. Kwinkqubo yokugquma, nokuba luhlobo lwemagnethi olujikelezayo okanye uhlobo lwetyhubhu ejikelezayo, zonke iindawo zomphezulu wetyhubhu ekujoliswe kuyo zidlula rhoqo kwindawo yokutshiza eyenziwe phambi kwemagnethi esisigxina ukuze ifumane ukutshiza kwe-cathode, kwaye ithagethi inokutshiza ngokulinganayo, kwaye izinga lokusetyenziswa kwethagethi liphezulu. Izinga lokusetyenziswa kwezinto ekujoliswe kuzo limalunga ne-80% ~ 90%.
2) Iithagethi ze-cylindrical aziyi kuba lula ukuvelisa "ityhefu ekujoliswe kuyo". Ngexesha lenkqubo yokugquma, umphezulu wetyhubhu ekujoliswe kuyo uhlala utshizwa kwaye ukrolwa zii-ion, kwaye akulula ukuqokelela ii-oxides ezingqindilili kunye nezinye iifilimu zokukhusela phezu komphezulu, kwaye akulula ukuvelisa "ityhefu ekujoliswe kuyo".
3) Ulwakhiwo lwetyhubhu yohlobo lwe-rotary target sputtering target oluyi-cylindrical sputtering target lulula kwaye kulula ukuyifaka.
4) Izinto zetyhubhu ezijoliswe kwi-cylindrical zineentlobo ezahlukeneyo. Ithagethi ejikelezileyo enethagethi yesinyithi epholisa ngqo amanzi, kwaye ezinye azinakucutshungulwa kwaye zenziwe iithagethi ezijikelezileyo, ezifana nethagethi ye-In2-SnO2, njl. kunye nezinto zepowder zokucinezela i-isostatic eshushu ukuze kufunyanwe iithagethi ezifana nepleyiti, kuba ubungakanani abunakwenziwa bube bukhulu, kwaye bube buthathaka, ngoko ke kuyimfuneko ukusebenzisa indlela ye-brazing kunye ne-backplate yobhedu ukuze kudityaniswe kwaye emva koko kufakwe kwisiseko sethagethi. Ukongeza kwimibhobho yesinyithi, iithagethi ezijikelezileyo zinokutshizwa kumphezulu wemibhobho yentsimbi engagqwaliyo ngezinto ezahlukeneyo ezifuna ukugqunywa, ezifana ne-Si, i-Cr, njl.
Okwangoku, umlinganiselo weethagethi zesilinda zokugquma kwimveliso yemizi-mveliso uyanda. Iithagethi zesilinda azisebenzisi nje kuphela kumatshini wokugquma othe nkqo kodwa zikwasetyenziswa nakumatshini wokugquma oqengqelekayo. Kwiminyaka yakutshanje, iithagethi zesibini ezijikelezileyo zithathelwa indawo kancinci kancinci ziithagethi zesibini zesilinda.
——Eli nqaku likhutshwe yiGuangdong Zhenhua Technology,umenzi weematshini zokugquma ezibonakalayo.
Ixesha lokuthumela: Meyi-11-2023