Mabhenefiti eCylindrical Target

1) Zvinangwa zveCylindrical zvine mwero wekushandiswa wakakwira kupfuura zvinangwa zveplanar. Mukuita kwekuputira, ingave iri mhando yemagineti inotenderera kana kuti inotenderera chubhu inotenderera, zvikamu zvese zvepamusoro pechubhu inotarirwa zvinoramba zvichipfuura nepakati penzvimbo inotarirwa inogadzirwa pamberi pemagineti anogara aripo kuti agamuchire kupurwa kwecathode, uye chinangwa chinogona kupurwa zvakaenzana, uye mwero wekushandiswa kwechinangwa wakakwira. Mwero wekushandiswa kwezvinhu zvinotarirwa ungangoita 80% ~ 90%.

2) Zvinangwa zve cylindrical hazvizove nyore kugadzira "chepfu inovavarira". Munguva yekuputira, pamusoro pechubhu inovavarira inogara ichitsvedzwa uye ichichekwa nemaion, uye hazvisi nyore kuunganidza ma oxide akakora nemamwe mafirimu ekudzivirira pamusoro, uye hazvisi nyore kugadzira "chepfu inovavarira".

3) Maumbirwo echubhu inotenderera ine cylindrical sputtering target ari nyore kuisa.

4) Zvinhu zvechubhu yesimbi zvine mhando dzakasiyana-siyana. Chinangwa chakarongwa chine mvura inotonhorera zvakananga, uye zvimwe hazvigone kugadziriswa uye kugadzirwa machubhu esimbi, senge In2-SnO2 target, nezvimwewo neupfu hwezvinhu zvinopisa kuti zviite seplate, nekuti saizi yacho haigone kuitwa yakakura, uye isina kusimba, saka zvinodikanwa kushandisa nzira yekubikisa necopper backplate kuti zvibatanidzwe uye zvozoiswa pachigadziko chechinangwa. Pamusoro pemapaipi esimbi, machubhu esimbi anogonawo kupfapfaidzwa pamusoro pemapaipi esimbi isina tsvina nezvinhu zvakasiyana-siyana zvinoda kuputirwa, zvakaita seSi, Cr, nezvimwewo.

Parizvino, huwandu hwezvinangwa zve cylindrical zvekuputira mukugadzirwa kwemaindasitiri huri kuwedzera. Zvinangwa zve cylindrical hazvingoshandiswi chete pamuchina wekuputira wakamira asiwo zvinoshandiswa mumuchina wekuputira we roll to roll. Mumakore achangopfuura, zvinangwa zve planar twin zvinotsiviwa zvishoma nezvishoma neCylindrical twin targets.

——Chinyorwa ichi chakaburitswa neGuangdong Zhenhua Technology, amugadziri wemichina yekuputira yemaziso.