1) ʻOi aku ka nui o ka hoʻohana ʻana o nā pahuhopu cylindrical ma mua o nā pahuhopu planar. I ke kaʻina hana uhi, inā he ʻano magnetic rotary a i ʻole he ʻano paipu rotary cylindrical sputtering target, hele mau nā ʻāpana āpau o ka ʻili o ka paipu target ma o ka sputtering i hana ʻia i mua o ka magnet mau loa e loaʻa ka cathode sputtering, a hiki ke sputtered like ʻia ka pahuhopu i kālai ʻia, a kiʻekiʻe ka nui o ka hoʻohana ʻana o ka pahuhopu. ʻO ka nui o ka hoʻohana ʻana o nā mea pahuhopu ma kahi o 80% ~ 90%.
2) ʻAʻole maʻalahi ka hana ʻana i nā pahuhopu cylindrical i ka "poisoning target". I ka wā o ke kaʻina hana uhi, ua pīpī mau ʻia ka ʻili o ka paipu target a ʻoki ʻia e nā ions, a ʻaʻole maʻalahi ka hōʻiliʻili ʻana i nā oxides mānoanoa a me nā kiʻiʻoniʻoni insulating ʻē aʻe ma ka ʻili, a ʻaʻole maʻalahi ka hana ʻana i ka "poisoning target".
3) He maʻalahi a maʻalahi hoʻi e hoʻouka ke ʻano o ka pahuhopu sputtering cylindrical rotary tube.
4) Loaʻa i nā ʻano like ʻole ka mea paipu pahuhopu cylindrical. ʻO ka pahuhopu planar me ka pahuhopu metala e hoʻomaʻalili pololei i ka wai, a ʻaʻole hiki ke hana ʻia kekahi a hoʻokumu ʻia nā pahuhopu cylindrical, e like me ka pahuhopu In2-SnO2, a pēlā aku me ka mea pauka no ke kaomi isostatic wela e loaʻa ai nā pahuhopu e like me ka pā, no ka mea ʻaʻole hiki ke hana nui a palupalu ka nui, no laila pono e hoʻohana i ke ʻano brazing a me ka backplate keleawe e hoʻohui a laila e hoʻokomo ma ke kumu pahuhopu. Ma waho aʻe o nā paipu metala, hiki ke pīpī ʻia nā pahuhopu kolamu ma luna o ka ʻili o nā paipu kila kila me nā mea like ʻole e pono ai ke uhi ʻia, e like me Si, Cr, a pēlā aku.
I kēia manawa, ke piʻi nei ka hapa o nā pahuhopu cylindrical no ka uhi ʻana i ka hana ʻoihana. ʻAʻole hoʻohana wale ʻia nā pahuhopu cylindrical no ka mīkini uhi kū pololei akā hoʻohana pū ʻia i ka mīkini uhi ʻōwili e ʻōwili. I nā makahiki i hala iho nei, ua pani mālie ʻia nā pahuhopu māhoe planar e nā pahuhopu māhoe Cylindrical.
——Ua hoʻokuʻu ʻia kēia ʻatikala e Guangdong Zhenhua Technology, hemea hana o nā mīkini uhi optical.
Ka manawa hoʻouna: Mei-11-2023