1) Intego za Cylindrical zifite igipimo cyo gukoresha kiri hejuru kurusha intego zisanzwe. Mu gikorwa cyo gusiga, byaba ari ubwoko bwa rukuruzi buzunguruka cyangwa intego ya cylindrical yo gusukamo amazi mu bwoko bwa rotary tube, ibice byose by'ubuso bw'umuyoboro w'ingenzi binyura mu gace gasukurwa imbere ya rukuruzi ihoraho kugira ngo byakire imiyoboro ya cathode, kandi intego ishobora gucukurwaho amazi mu buryo bumwe, kandi igipimo cyo gukoresha amazi mu ntego kiba kiri hejuru. Igipimo cyo gukoresha ibikoresho by'ingenzi kiri hagati ya 80% na 90%.
2) Ibice by'umusarani ntibizoroha gukora "uburozi bw'intego". Mu gihe cyo gusiga, ubuso bw'umuyoboro w'intego buhora butotagurika kandi bugasigwa na iyoni, kandi ntabwo byoroshye kwegeranya okiside nini n'izindi firime zirinda ubushyuhe ku buso, kandi ntabwo byoroshye gukora "uburozi bw'intego".
3) Imiterere y'ikimenyetso cy'umuyoboro w'amazi uzunguruka wo mu bwoko bwa cylindrical sputtering target yoroshye kandi yoroshye gushyiraho.
4) Ibikoresho by'umuyoboro w'icyuma bifite ubwoko butandukanye: intego ifite planar hamwe n'icyuma gikonjesha amazi, kandi bimwe ntibishobora gutunganywa no gukorwa intego zifite symmetrical, nka In2-SnO2 target, nibindi hamwe n'ibikoresho by'ifu kugira ngo hakorwe ibisa n'ibisa n'ibisa n'ibisa n'ibisa n'ibisa n'ibisa n'ibisharira, kuko ingano idashobora kuba nini, kandi iracikagurika, bityo ni ngombwa gukoresha uburyo bwo gukaraba n'icyuma gifunga inyuma kugira ngo bihuzwe hanyuma bigashyirwa ku gice cy'ingenzi. Uretse imiyoboro y'icyuma, intego zifite inkingi zishobora no gusukwa ku buso bw'imiyoboro y'icyuma kidashonga hamwe n'ibikoresho bitandukanye bigomba gusigwa, nka Si, Cr, nibindi.
Kuri ubu, igipimo cy'ibipimo by'imirongo y'ubudodo mu nganda kirimo kwiyongera. Ibipimo by'imirongo y'ubudodo ntibikoreshwa gusa ku mashini ikora irangi ihagaze, ahubwo binakoreshwa mu mashini ikora irangi irangi irangi. Mu myaka ya vuba aha, ibipimo by'imirongo y'ubudodo bw ...
——Iyi nkuru yasohotse na Guangdong Zhenhua Technology,uruganda rukora imashini zisiga irangi ry'urumuri.
Igihe cyo kohereza: Gicurasi-11-2023