1) Okuhlosiwe kwe-cylindrical kunezinga lokusetshenziswa Eliphezulu kunezinhloso zepulani. Enqubweni yokumboza, kungakhathaliseki ukuthi kuwuhlobo oluyi-rotary kazibuthe noma ishubhu elijikelezayo lohlobo lwe-cylindrical sputtering target, zonke izingxenye zobuso beshubhu eliqondiwe ngokuqhubekayo zidlula endaweni yokufafaza ekhiqizwe phambi kukazibuthe ongunaphakade ukuze zithole ukushaya kwe-cathode, futhi okuqondiwe kungagxilwa ngokulinganayo, futhi izinga lokusebenzisa okuhlosiwe liphezulu. Izinga lokusetshenziswa kwezinto ezihlosiwe cishe lingama-80% ~ 90%.
I-2) Okuhlosiwe kwe-cylindrical ngeke kube lula ukukhiqiza "ubuthi obuhlosiwe". Phakathi nenqubo yokumboza, ingaphezulu leshubhu eliqondiwe lihlala lihlanjululwe futhi lifakwe ama-ion, futhi akulula ukuqoqa ama-oxide aminyene namanye amafilimu avikelayo ebusweni, futhi akulula ukukhiqiza "ubuthi obuhlosiwe".
3) Isakhiwo se-rotary target tube type cylindrical sputtering target ilula futhi kulula ukuyifaka.
4) I-cylindrical target target material inezinhlobo ezahlukene. i-planar target enethagethi yensimbi epholisa amanzi eqondile, futhi amanye awakwazi ukucutshungulwa futhi akhe okuqondisiwe okuyisilinda, okufana nethagethi ye-In2-SnO2, njll. ngezinto eziyimpushana zokucindezela okushisayo kwe-isostatic ukuze kutholwe okuhlosiwe okufana nepuleti, ngenxa yokuthi usayizi awukwazi ukwenziwa ube mkhulu, futhi ube brittle, ngakho-ke kuyadingeka ukusebenzisa indlela yokubhula ne-backplate yethusi ukuze uhlanganise bese ufaka kusisekelo esiqondiwe. Ngaphandle kwamapayipi ensimbi, izinhloso ze-columnar zingaphinda zifafazwe phezu kwamapayipi ensimbi angenalutho ngezinto ezihlukahlukene ezidinga ukumbozwa, njenge-Si, Cr, njll.
Njengamanje, inani lezinhloso ze-cylindrical zokugqoka ekukhiqizeni izimboni liyakhula. Okuqondiwe kwe-Cylindrical akusebenzisi nje kuphela umshini wokuhlanganisa oqondile kodwa futhi kusebenzisa umshini wokumboza wokugoqa. Eminyakeni yamuva nje, okuhlosiwe okungamawele okuplana kancane kancane kuthathelwe indawo okuhlosiwe okuyi-Cylindrical twin.
——Le ndatshana ikhishwe nguGuangdong Zhenhua Technology, aumkhiqizi wemishini yokuhlanganisa optical.
Isikhathi sokuthumela: May-11-2023