(4) Izinto ezijoliswe kuzo. Izinto ezijoliswe kuzo zibalulekile ekutshizeni, ngokubanzi, lo gama nje izinto ezijoliswe kuzo zihlangabezana neemfuno, kwaye ulawulo oluqinileyo lweeparamitha zenkqubo lunokufuneka ukuze kufunyanwe umaleko wefilimu. Ukungcola kwizinto ezijoliswe kuzo kunye nee-oxides zomphezulu kunye nezinye izinto ezingcolileyo zingumthombo obalulekileyo wongcoliseko lwefilimu, ngoko ke ukuze kufunyanwe umaleko ococekileyo kakhulu, ukongeza ekusebenziseni izinto ezijoliswe kuzo ezicocekileyo kakhulu, kwi-sputter nganye kufuneka kubekho ithagethi yokuqala yokutshiza kwangaphambili ukuze kucocwe umphezulu wethagethi, kususwe umphezulu wethagethi yomaleko we-oxide.
(5) I-vacuum yangasemva. Inqanaba le-vacuum yangasemva libonisa ngokuthe ngqo ubungakanani begesi eseleyo kwinkqubo, kwaye igesi eseleyo ikwangumthombo obalulekileyo wongcoliseko lwefilimu, ngoko ke i-vacuum yangasemva kufuneka iphuculwe kangangoko kunokwenzeka. Kwingxaki enye yongcoliseko yipompo yokusasazwa kweoyile ebuyela kwioyile, nto leyo ebangela ukuba i-carbon doping kwi-membrane, iimfuno ezingqongqo ze-membrane kufuneka zithathe amanyathelo afanelekileyo okanye kusetyenziswe inkqubo yokumpompa i-vacuum ephezulu engenawo amafutha.
(6) uxinzelelo lomoya oluphumayo. Uxinzelelo lomoya olusebenzayo luchaphazela ngokuthe ngqo izinga lokufakwa kwe-membrane.
Ukongeza, ngenxa yezixhobo ezahlukeneyo zokutshiza kwintsimi yombane, umoya, izinto ekujoliswe kuzo, ubushushu be-substrate kunye nesakhiwo sejometri seeparameters zonxibelelwano phakathi kwe-membrane ukuvelisa iimfuno, kuyimfuneko ukwenza iimvavanyo kwiiparameters zenkqubo, apho inkqubo engcono kakhulu ixhomekeke khona.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha leposi: Jan-05-2024