Kwiinkqubo zokugquma i-vacuum ezifuna umgudu,ucoceko lwegumbiimisela ngokuthe ngqo uxinzelelo olusisiseko, ubumsulwa befilimu, ukunamathela, kunye nokusebenza kwemveliso ekugqibeleni. Ukucoca rhoqo imihla ngemihla akwanelanga ukususa izinto ezingcolisayo eziqokelelene ngokuhamba kwexesha. Ke ngoko, ukucoca okunzulu rhoqo yinkqubo ebalulekileyo yokugcina imigangatho ephezulu yemveliso. Eli nqaku lichaza ngokucwangcisiweyo iinkqubo zobungcali kunye nezinto ezibalulekileyo ekufuneka ziqwalaselwe xa kucocwa ngokunzulu amagumbi okucoca acocekileyo.
I. Iinkqubo zoLungiselelo lwangaphambi kokucoca kunye noKhuseleko
Ukukhupha umoya kwinkqubo kunye nokwahlulwa kwamandla: Qinisekisa ukuba yonke imijikelo yenkqubo igqityiwe kwaye igumbi libuyiselwa kuxinzelelo lomoya. Sebenzisa inkqubo epheleleyo ye-Lockout-Tagout ukuze wahlukanise yonke imithombo yamandla (umbane ophezulu, i-RF, izifudumezi), izibonelelo zegesi, kunye nemibhobho yamanzi, ukuqinisekisa ukhuseleko lokusebenza.
Ukususwa kweCandelo kunye nokuHlulwa kweNdawo: Qhawula zonke izinto zangaphakathi ezisuswayo, ezifana nezibambi ze-substrate, ii-shutters, ii-evaporation boats, ii-arc cathodes, ii-baffles, kunye neentloko ze-sensor ze-quartz crystal micro monitors. Oku kwahlula igumbi libe ziindawo ezimbini eziphambili zokucoca: "umzimba oyintloko" kunye "nezixhobo," nto leyo eyenza kube lula ukucoca ngokucokisekileyo.
Uhlalutyo lweZinto ezingcolisayo: Yenza uvavanyo lokuqala lweentlobo zezinto ezingcolisayo, ezidla ngokuquka:
Iintsalela ezifakwe ipolymer: I-Splatter evela kwimithombo ye-PVD okanye kwii-evaporants.
Iingubo ezingaphiliyo: Iifilimu ezincinci ezifakwe kwiindawo ezingezizo ezingaphantsi komhlaba (umz., iindonga zegumbi).
Iintsalela zeOyile zePump yoVuthamu: Ungcoliseko lweHydrocarbon olubangelwa kukubuyela umva okanye ukungasebenzi kakuhle kwepompo.
Izinto ezingcolisayo: Uthuli, imicu, okanye amasuntswana efilimu aqhekekileyo.
II. Iindlela zokucoca kunye nokukhethwa kweenkqubo
Iindlela ezifanelekileyo zokucoca kufuneka zikhethwe ngokusekelwe kwizinto ezithile ezingcolisayo, ngokuqhelekileyo zilandela ulandelelwano ukusuka ekucoceni ngokwasemzimbeni ukuya kwiikhemikhali.
Iindlela Zokucoca Ngomzimba
Ukuqhumisa Omileyo/Ukuqhumisa Amabele: Kusebenzisa imidiya ecocekileyo, engasebenzi kakuhle ngokweekhemikhali (umz., i-alumina, i-sodium bicarbonate) kuxinzelelo olulawulwayo ukuze ichaphazele iindonga zegumbi kunye neengubo ezinzima. Kususa ngokufanelekileyo amaqhuqhuva aqinileyo kunye nongcoliseko olungqindilili, okwenza umphezulu ofanayo ube matte.
IiWipers EzingenaLint kunye Nezinyibilikisi Ezicocekileyo Kakhulu: Kwiindawo ezinkulu ezinongcoliseko oluqhelekileyo, sebenzisa iiwipers ezingalukwanga (umz., i-polyester okanye amalaphu angenalint) afunyiswe ngezinyibilikisi ezicocekileyo kakhulu (umz., i-Isopropyl Alcohol, i-Acetone, okanye ii-VOC ezikhethekileyo). Sula ngendlela echanekileyo ukuze ungangcolisi.
Iindlela zokucoca iikhemikhali
Ukucocwa kweSoluli: Iioyile ezijolisiweyo kunye neepolymers ezithile zinokulungiswa kusetyenziswa izinyibilikisi ezithile zokuntywilisela okanye zokucima. Ukususwa ngokupheleleyo kwesinyibilikisi kuyimfuneko emva kokucoca ukuze kuthintelwe ukuba singabi ngumthombo omtsha wongcoliseko kwaye kuthintele ukufikelela kwi-vacuum.
Ukucwilisa nokususa iikhemikhali: Nxiba izinto ezisusiweyo kwii-strippers ezizii-coating okanye kwizisombululo ze-acidic/alkaline (umz., i-nitric acid, i-sodium hydroxide) ukuze kunyibilikiswe ii-inorganic coatings kunye nee-oxides. Lawula ngokungqongqo uxinaniso, amaqondo obushushu, kunye nexesha lokuntywiliselwa ukuze uphephe ukubola kwe-substrate. Landela ngokuhlamba kakuhle usebenzisa amanzi acocekileyo kwaye womise ngokukhawuleza.
Ukusebenza komphezulu kunye nokuPasa
Kwiigumbi zentsimbi engagqwaliyo, unyango lokuthambisa lungasetyenziswa emva kokucoca nzulu ukuze kwenziwe umaleko okhuselekileyo we-chrom oxide, ophucula ukumelana nokugqwala kunye nokunciphisa amazinga okuphuma kwegesi.
III. Unyango kunye nokuqinisekiswa emva kokucoca
Ukucocwa kwe-Ultrasonic: Kwizinto ezinejometri ezintsonkothileyo, ukucocwa kwe-ultrasonic kusebenzisa i-cavitation ukususa ngempumelelo amasuntswana angaphantsi kwe-micron kwi-micropores nakwimingxunya.
Ukomisa: Zonke izinto ezicociweyo mazimiswe kusetyenziswa i-nitrogen eyomileyo okanye umoya ongenayo ioyile kwaye zibekwe ngoko nangoko kwi-oven ukuze zibhakwe kubushushu obufanelekileyo (umz., 80-120°C) ukuze kususwe ngokupheleleyo umswakama ofunxwayo.
Ukudibanisa kwakhona kunye nokujonga ukuvuza: Phinda ufake zonke izinto ezomileyo nezicocekileyo ubuyisele kwigumbi. Ngaphambi kokupompa, coca okwethutyana igumbi nge-nitrogen ecocekileyo kakhulu. Qalisa inkqubo yokupompa kwaye wenze uhlolo lokuvuza okukhulu kwinqanaba lokuphuma kwamanzi ukuqinisekisa ukuba akukho kuvuza kuzo zonke iindawo zokuvala kunye noqhagamshelo lweflange.
Ukuqinisekiswa Kokusebenza: Yenza umjikelo oqhelekileyo wokupompoza, urekhode ijika loxinzelelo vs. ixesha ukusuka kwi-rough ukuya kwi-high vacuum, kwaye uyithelekise nedatha yokucoca kwangaphambili. Uxinzelelo olusisiseko oluphezulu kunye nokuzinza kwalo zezona milinganiselo zibalulekileyo zokugweba ukusebenza kakuhle kokucoca. Uvavanyo olungenanto (ngaphandle kwe-substrates) lunokwenziwa, kulandele ukujonga nge-QCM okanye izixhobo zohlalutyo lomphezulu ukuba kukho nakuphi na ukuphuma kwegesi okanye ukungcola okungaqhelekanga.
Isiphelo
Ukucoca nzulu igumbi lokucoca umoya ngumsebenzi wobunjineli ocwangcisiweyo nochanekileyo, kungekhona nje umsebenzi wokucoca. Kufuna ukuba abaqhubi babe nokuqonda okunzulu ngeendlela zokungcola, ukuhambelana kwezinto, kunye neenkcukacha zenkqubo. Ngokuseka nangokunamathela ngokungqongqo kwiprotokholi yokucoca nzulu esemgangathweni, amazinga eziphene kwimveliso anokuncitshiswa kakhulu, ukuphindaphinda kokusebenza kwefilimu encinci kuphuculwe, kwaye ubomi benkonzo yezixhobo buyandiswa, ngaloo ndlela kuqinisekiswa ukuba inkqubo ilungile kwaye imveliso ithembekile kwimarike yokhuphiswano.
—Eli nqaku lipapashwe ngu izixhobo zokugquma ze-magnetron sputteringtumenzi we-Zhenhua Vacuum
Ixesha leposi: Oktobha-31-2025