A cikin tsarin rufewa mai wahala,Tsaftar ɗakinkai tsaye yana ƙayyade matsin lamba na tushe, tsarkin fim, mannewa, da kuma aikin samfurin gaba ɗaya. Tsaftacewa na yau da kullun bai isa ba don cire gurɓatattun abubuwa masu tauri da ke taruwa a tsawon lokaci. Don haka, tsaftacewa mai zurfi lokaci-lokaci hanya ce mai mahimmanci don kiyaye manyan matakan samarwa. Wannan labarin ya yi bayani dalla-dalla kan hanyoyin ƙwararru da mahimman abubuwan da za a yi la'akari da su don tsabtace ɗakunan injinan iska mai zurfi.
I. Shirye-shiryen Tsaftacewa da Ka'idojin Tsaro Kafin Tsaftacewa
Tsarin Iska da Warewa da Wutar Lantarki: Tabbatar da cewa an kammala dukkan zagayen aiki kuma an mayar da ɗakin zuwa matsin lamba na yanayi. Aiwatar da cikakken tsarin Kulle-Tagout don ware dukkan hanyoyin wutar lantarki (ƙarfin lantarki mai yawa, RF, masu dumama), kayan iskar gas, da layukan ruwa, don tabbatar da amincin aiki.
Cire Sassan da Yankunan da Aka Yi: Rufe dukkan sassan ciki da za a iya cirewa, kamar masu riƙe substrate, rufewa, jiragen ruwa na evaporation, arc cathodes, baffles, da kuma kawunan firikwensin na na'urorin saka idanu na quartz crystal micro. Wannan ya raba ɗakin zuwa manyan wurare biyu na tsaftacewa: "babban jiki" da "sassan," wanda ke sauƙaƙa tsaftacewa sosai.
Binciken Gurɓataccen Abinci: Gudanar da kimantawa ta farko game da nau'ikan gurɓatattun abubuwa, waɗanda suka haɗa da:
Ragowar da aka yi da polymer: Rabawa daga tushen PVD ko kuma ƙafewar tururi.
Rufin da Ba ya Aiki da Kwayoyi: Siraran fim da aka ajiye a wuraren da ba su da tushe (misali, bangon ɗakin).
Ragowar Man Fetur Mai Na'urar Vacuum: Gurɓatar da iskar hydrogen saboda matsalar famfo ko kuma matsalar da ke tattare da shi.
Gurɓatattun Abubuwa: Kura, zare, ko barbashi masu fashewa.
II. Hanyoyin Tsaftacewa da Zaɓin Tsarin Aiki
Dole ne a zaɓi hanyoyin tsaftacewa masu dacewa bisa ga takamaiman gurɓatattun abubuwa, galibi suna bin tsari daga tsaftacewa ta zahiri zuwa ta sinadarai.
Hanyoyin Tsaftace Jiki
Busasshen Busawa/Busasshen Bead: Yana amfani da sinadari mai kyau, wanda ba ya aiki da sinadarai (misali, alumina, sodium bicarbonate) a matsin lamba mai sarrafawa don shafar bangon ɗakin da manyan rufi. Yana cire ƙuraje masu tauri da gurɓatattun abubuwa masu kauri yadda ya kamata, yana samar da saman matte iri ɗaya.
Mashinan gogewa marasa lint da kuma sinadaran tsarkakewa masu ƙarfi: Ga manyan wurare masu gurɓatawa gabaɗaya, yi amfani da mashinan gogewa marasa sakawa (misali, polyester ko zane marasa lint) waɗanda aka jika da sinadarai masu ƙarfi masu ƙarfi (misali, Isopropyl Alcohol, Acetone, ko VOCs na musamman). A goge ta hanya ɗaya tilo don guje wa gurɓatawa.
Hanyoyin Tsaftace Sinadarai
Tsaftace Maganin Tsaftacewa: Ana iya magance man da aka yi niyya da wasu sinadarai ta amfani da takamaiman sinadarai don nutsewa ko gogewa. Cire maganin gaba ɗaya dole ne bayan tsaftacewa don hana shi zama sabon tushen gurɓatawa da kuma hana samun iska.
Jikewa da Cire Sinadarai: A nutsar da abubuwan da aka cire a cikin na'urorin cire fenti na musamman ko kuma maganin acidic/alkaline (misali, nitric acid, sodium hydroxide) don narkar da rufin da ba na halitta ba da kuma oxides. A kula da yawan danshi, zafin jiki, da lokacin nutsewa don guje wa tsatsa. A biyo baya da kurkure sosai ta amfani da ruwan da aka cire da kuma busarwa cikin sauri.
Kunnawa da Faɗin Sama da Passivation
Ga ɗakunan ƙarfe na bakin ƙarfe, ana iya amfani da maganin passivation bayan tsaftacewa mai zurfi don samar da kariyar chrom oxide mai yawa, yana ƙara juriya ga lalata da rage yawan fitar da iskar gas.
III. Maganin da Tabbatarwa Bayan Tsaftacewa
Tsaftace Ultrasonic: Ga abubuwan da ke da siffofi masu rikitarwa, tsaftacewar ultrasonic tana amfani da cavitation don cire ƙananan ƙwayoyin micron yadda ya kamata daga ƙananan ramuka da ramuka.
Busarwa: Dole ne a busar da duk kayan da aka tsaftace ta amfani da sinadarin nitrogen ko iska mara mai, sannan a sanya su nan da nan a cikin tanda don yin burodi a zafin da ya dace (misali, 80-120°C) don cire danshi mai sha sosai.
Sake Haɗawa da Duba Zubewar Ruwa: Sake shigar da duk kayan busassun da tsafta a cikin ɗakin. Kafin a sauke ruwan, a ɗan share ɗakin da sinadarin nitrogen mai tsafta. Fara tsarin famfo kuma a yi gwajin zubewar ruwa mai kauri a matakin tsabtace iska don tabbatar da babu zubewar ruwa a duk saman rufewa da haɗin flange.
Tabbatar da Aiki: Gudanar da tsarin da aka saba amfani da shi wajen rage matsin lamba, yin rikodin matsi da lokaci daga ƙazanta zuwa babban injin tsabtace iska, sannan a kwatanta shi da bayanan kafin tsaftacewa. Matsakaicin matsin lamba na tushe da kwanciyar hankalinsa sune ma'auni mafi mahimmanci don tantance ingancin tsaftacewa. Ana iya yin aikin ɓoyewa mara komai (ba tare da substrates ba), sannan a bi sahun sa ido tare da QCM ko kayan aikin nazarin saman don duk wani fitowar iskar gas mara kyau ko gurɓataccen abu.
Kammalawa
Tsaftace ɗakin da babu iska mai zurfi aiki ne na injiniya mai tsari, daidaitacce, ba wai kawai aikin tsaftacewa ba. Yana buƙatar masu aiki su fahimci hanyoyin gurɓatawa, dacewar kayan aiki, da ƙayyadaddun tsari. Ta hanyar kafa da kuma bin ƙa'idar tsaftacewa mai zurfi, ƙimar lahani a cikin samarwa na iya raguwa sosai, ƙara yawan maimaita aikin fim mai sirara, da tsawaita tsawon rayuwar sabis na kayan aiki, ta haka ne za a tabbatar da fifikon tsari da amincin samfura a kasuwa mai gasa.
—An buga wannan labarin ne ta hannun kayan aikin shafa magnetron sputteringtmasana'anta Zhenhua injin injin
Lokacin Saƙo: Oktoba-31-2025